San Ramon, California
United States
9
2016-06-02
The entities that hold a legal rights for patent applications filed by inventor Lee Wonchul:
Wonchul Lee from San Ramon, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Etch process with pre-etch transient conditioning
#2 | 2015-12-31Etch process with pre-etch transient conditioning
#3 | 2015-12-03Continuous plasma etch process
#4 | 2014-11-06Continuous plasma ETCH process
#5 | 2014-06-19Etch process with pre-etch transient conditioning
#6 | 2013-04-04Etch with pulsed bias
#7 | 2013-01-31Method of hard mask CD control by Ar sputtering
#8 | 2011-11-17Pulsed bias plasma process to control microloading
#9 | 2011-06-23Method of controlling etch microloading for a tungsten-containing layer
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