Matthias Bauer

Methods and apparatus for a gas panel with constant gas flow

Methods and apparatus for a gas panel with constant gas flow

High throughput cyclical epitaxial deposition and etch process

Selective epitaxial formation of semiconductive films

Cyclical epitaxial deposition and etch

Structure comprises an As-deposited doped single crystalline Si-containing film

Separate injection of reactive species in selective formation of films

Epitaxial growth of relaxed silicon germanium layers

Separate injection of reactive species in selective formation of films

Inhibitors for selective deposition of silicon containing films

Methods of making substitutionally carbon-doped crystalline Si-containing materials by chemical vapor deposition

METHODS AND SYSTEMS FOR SELECTIVELY DEPOSITING SI-CONTAINING FILMS USING CHLOROPOLYSILANES

Dual channel heterostructure

Selective epitaxial formation of semiconductor films

Photodetectors employing germanium layers

Epitaxial deposition of doped semiconductor materials

Apparatus and method for depositing silicon germanium films

Deposition of silicon germanium on silicon-on-insulator structures and bulk substrates

Methods of making substitutionally carbon-doped crystalline Si-containing materials by chemical vapor deposition

Selective deposition of silicon-containing films

Methods of depositing electrically active doped crystalline Si-containing films

Deposition of silicon germanium on silicon-on-insulator structures and bulk substrates