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Inventor profile of:

Si Li

City:

Rolla, Missouri

Country:

United States

Published Applications:

2

Last publication date:

2025-06-26

Recent patent applications by Li Si

Si Li from Rolla, US has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2025-06-26

US20250208517A1

ACIDIC SPIN-ON CARBON (SOC) LAYER FOR EUV LITHOGRAPHY

#2 | 2024-08-22

US20240280905A1

UNDERLAYER AND METHODS FOR EUV LITHOGRAPHY

InventorID:

6757460 ⎘