🔗 Permalink

Inventor profile of:

Lothar Bauch

City:

Dresden

Country:

Germany

Published Applications:

9

Last publication date:

2015-05-21

Top Assignees for applications by Lothar Bauch

The entities that hold a legal rights for patent applications filed by inventor Bauch Lothar:

Infineon Technologies AG 3 Munich, Germany
GLOBALFOUNDRIES Inc. 2 Grand Cayman, Cayman Islands
Qimonda AG 1 Muenchen, Germany

Recent patent applications by Bauch Lothar

Lothar Bauch from Dresden, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2015-05-21

US20150140695A1

Method and system for determining overlap process windows in semiconductors by inspection techniques

#2 | 2014-03-06

US20140065734A1

Method and system for determining overlap process windows in semiconductors by inspection techniques

#3 | 2008-12-16

US10487911

Photolithographic mask having half tone main features and perpendicular half tone assist features

#4 | 2007-10-18

US20070243707A1

Hard Mask Layer Stack And A Method Of Patterning

#5 | 2007-09-20

US20070218627A1

Device and a method and mask for forming a device

#6 | 2006-11-16

US20060257794A1

Method for transferring structures from a photomask into a photoresist layer

#7 | 2006-07-18

US10353463

Photolithographic mask

#8 | 2005-07-14

US20050153216A1

Lithography mask and lithography system for direction-dependent exposure

#9 | 2005-03-31

US20050068515A1

Method for detecting positioning errors of circuit patterns during the transfer by means of a mask into layers of a substrate of a semiconductor wafer

InventorID:

677048 ⎘