Newark, California
United States
10
2015-02-26
The entities that hold a legal rights for patent applications filed by inventor Pape Eric:
Eric Pape from Newark, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Controlling CD and CD uniformity with trim time and temperature on a wafer by wafer basis
#2 | 2014-08-07Controlling CD and CD uniformity with trim time and temperature on a wafer by wafer basis
#3 | 2014-03-06PROTECTIVE COATING FOR A PLASMA PROCESSING CHAMBER PART AND A METHOD OF USE
#4 | 2012-07-05Methods and apparatus for normalizing optical emission spectra
#5 | 2011-01-13Optical system and methods for monitoring erosion of electrostatic chuck edge bead materials
#6 | 2010-12-30Methods and apparatus for predictive preventive maintenance of processing chambers
#7 | 2009-11-26Electrical and optical system and methods for monitoring erosion of electrostatic chuck edge bead materials
#8 | 2009-10-08Methods and apparatus for normalizing optical emission spectra
#9 | 2009-08-13Protective coating for a plasma processing chamber part and a method of use
#10 | 2009-01-01Collimator arrangements including multiple collimators and implementation methods thereof
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