Hinterbrühl
Austria
4
2026-07-02
The entities that hold a legal rights for patent applications filed by inventor Liertzer Matthias:
Matthias Liertzer from Hinterbrühl, AT has applied for patents for these inventions. The list has both pending applications and granted patents:
Particle-Beam Writing Method Using a Stripe Exposure Order Within a Finite Stripe Window
#2 | 2024-09-12Method for Determining Focal Properties in a Target Beam Field of a Multi-Beam Charged-Particle Processing Apparatus
#3 | 2023-11-09Multi-Beam Pattern Definition Device
#4 | 2023-09-21Correction of Thermal Expansion in a Lithographic Device
6777149 ⎘