Oberkochen
Germany
8
2018-09-06
The entities that hold a legal rights for patent applications filed by inventor Wolf Alexander:
Alexander Wolf from Oberkochen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Imaging optical unit for imaging an object field into an image field, and projection exposure apparatus including such an imaging optical unit
#2 | 2017-10-12Optical component for use in a radiation source module of a projection exposure system
#3 | 2016-02-25Projection exposure apparatus with a highly flexible manipulator
#4 | 2016-01-07Microlithographic apparatus and method of varying a light irradiance distribution
#5 | 2015-11-05Projection exposure apparatus including mechanism to reduce influence of pressure fluctuations
#6 | 2015-07-16Projection exposure apparatus for microlithography comprising an optical distance measurement system
#7 | 2014-03-13Imaging optical unit
#8 | 2011-11-24Projection objective with diaphragms
684319 ⎘