Oberkochen
Germany
4
2026-04-30
Andreas Seifert from Oberkochen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
METHOD FOR INCORPORATING TEMPERATURE-REGULATING HOLLOW STRUCTURES INTO A SUBSTRATE, IN PARTICULAR INTO A SUBSTRATE FOR AN OPTICAL ELEMENT FOR AN EUV PROJECTION EXPOSURE APPARATUS, AND PROCESSING SYSTEM THEREFOR, METHOD AND SUBSTRATE FOR PRODUCING AN OPTICAL ELEMENT, OPTICAL ELEMENT, AND SEMICONDUCTOR TECHNOLOGY APPARATUS
#2 | 2026-04-16SUBSTRATE FOR PRODUCING AN OPTICAL ELEMENT, OPTICAL ELEMENT AND ALSO SEMICONDUCTOR TECHNOLOGY APPARATUS
#3 | 2024-12-19METHOD FOR INCORPORATING TEMPERATURE-REGULATING HOLLOW STRUCTURES INTO A SUBSTRATE, IN PARTICULAR INTO A SUBSTRATE FOR AN OPTICAL ELEMENT, METHOD AND SUBSTRATE FOR PRODUCING AN OPTICAL ELEMENT, OPTICAL ELEMENT, PROCESSING SYSTEM AND ALSO APPARATUS PERTAINING TO SEMICONDUCTOR TECHNOLOGY AND STRUCTURED ELECTRONIC COMPONENT
#4 | 2024-12-19METHOD FOR PRODUCING A TEMPERATURE-CONTROLLING HOLLOW STRUCTURE IN A SUBSTRATE USING A PROCESSING LIGHT BEAM
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