Ulm
Germany
6
2026-06-04
Werner WEISS from Ulm, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
METHOD AND CONTROL DEVICE FOR PRODUCING AN OPTICAL SYSTEM FOR A LITHOGRAPHY APPARTUS
#2 | 2026-05-21MIRROR SYSTEM, METHOD FOR OPERATING A MIRROR SYSTEM, PROJECTION LENS FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE SYSTEM, AND COMPUTER PROGRAM PRODUCT
#3 | 2026-05-07METHOD FOR REDUCING ABERRATIONS OF AN OPTICAL ELEMENT, OPTICAL ELEMENT AND SEMICONDUCTOR SYSTEM
#4 | 2025-04-17METHOD FOR HEATING AN OPTICAL ELEMENT, AND OPTICAL SYSTEM
#5 | 2025-03-27METHOD FOR HEATING AN OPTICAL ELEMENT, AND OPTICAL SYSTEM
#6 | 2025-03-20METHOD FOR OPERATING A PROJECTION EXPOSURE SYSTEM, AND PROJECTION EXPOSURE SYSTEM
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