Braunschweig
Germany
3
2023-03-02
The entities that hold a legal rights for patent applications filed by inventor Vergöhl Michael:
Michael Vergöhl from Braunschweig, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Device and method for producing layers with improved uniformity in coating systems with horizontally rotating substrate and additional plasma sources
#2 | 2022-07-07DEVICE AND METHOD FOR COATING SUBSTRATES HAVING PLANAR OR SHAPED SURFACES BY MEANS OF MAGNETRON SPUTTERING
#3 | 2021-06-03DEVICE AND METHOD FOR PRODUCING LAYERS WITH IMPROVED UNIFORMITY IN COATING SYSTEMS WITH HORIZONTALLY ROTATING SUBSTRATE GUIDING
6966864 ⎘