Yuichi Deba

City:

Kyoto

Country:

Japan

Published Applications:

Last publication date:

2023-08-31

Top Assignees for applications by Yuichi Deba

The entities that hold a legal rights for patent applications filed by inventor Deba Yuichi:

Yuichi Deba from Kyoto, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

Substrate processing apparatus and monitoring method in substrate processing apparatus

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

Substrate holder state detection device and substrate holder state detection method

InventorID:

6991760 ⎘