Niederschoenefeld
Germany
3
2026-05-07
Andreas RABA from Niederschoenefeld, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
OPTICAL MODULE AND PROJECTION EXPOSURE SYSTEM
#2 | 2026-04-23PROJECTION OBJECTIVE OF A PROJECTION EXPOSURE SYSTEM, AND PROJECTION EXPOSURE SYSTEM
#3 | 2025-07-03MIRROR DEVICE, FOR EXAMPLE FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE SYSTEM, AND METHOD FOR MEASURING THE TEMPERATURE OF A MIRROR
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