aalen
Germany
5
2026-04-30
Katja Schick from aalen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
METHOD AND DEVICE FOR THE POST-TREATMENT OF A FLUORIDE LAYER FOR AN OPTICAL SYSTEM FOR THE VUV WAVELENGTH RANGE, AND OPTICAL ELEMENT COMPRISING SAID FLUORIDE LAYER
#2 | 2025-12-25OPTICAL ELEMENT FOR REFLECTION OF RADIATION IN THE VUV WAVELENGTH REGION
#3 | 2025-08-28METHOD FOR OPERATING AN OPTICAL SYSTEM, AND OPTICAL SYSTEM
#4 | 2025-08-14METHOD AND APPARATUS FOR ATOMIC LAYER DEPOSITION OF A FLUORIDE LAYER, OPTICAL ELEMENT AND OPTICAL ARRANGEMENT
#5 | 2025-07-17METHOD AND DEVICE FOR FORMING A FLUORIDE OR OXYLFLUORIDE LAYER FOR AN OPTICAL ELEMENT FOR THE VUV WAVELENGTH RANGE, AND OPTICAL ELEMENT COMPRISING SAID FLUORIDE OR OXYLFLUORIDE LAYER
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