Wannweil
Germany
11
2016-04-28
The entities that hold a legal rights for patent applications filed by inventor ULM Markus:
Markus ULM from Wannweil, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
CMOS integrated moving-gate transducer with silicon as a functional layer
#2 | 2014-06-26CMOS integrated moving-gate transducer with silicon as a functional layer
#3 | 2014-04-17Tri-axis accelerometer having a single proof mass and fully differential output signals
#4 | 2010-09-09Method for controlling a device and a device for controlling the device
#5 | 2010-08-05Sensor device
#6 | 2009-11-12Microelectromechanical systems encapsulation process
#7 | 2008-10-30Method of producing a device
#8 | 2008-05-29Microelectromechanical devices and fabrication methods
#9 | 2008-04-03Energy harvesting device manufactured by print forming processes
#10 | 2008-02-28Microelectromechanical systems encapsulation process with anti-stiction coating
#11 | 2008-02-28Microelectromechanical systems encapsulation process
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