Michael C. Kellogg

SYSTEMS AND METHODS FOR INCREASING A HEAT TRANSFER CONTACT AREA ASSOCIATED WITH AN EDGE RING

RING STRUCTURES AND SYSTEMS FOR USE IN A PLASMA CHAMBER

MULTI-SECTIONAL PLASMA CONFINEMENT RING STRUCTURE

RING STRUCTURES AND SYSTEMS FOR USE IN A PLASMA CHAMBER

SLIDE AND PIVOT ASSEMBLIES FOR PROCESS MODULE BIAS ASSEMBLIES OF SUBSTRATE PROCESSING SYSTEMS

LINEAR ARRANGEMENT FOR SUBSTRATE PROCESSING TOOLS

Wafer transport assembly with integrated buffers

Ring Structures and Systems for Use in a Plasma Chamber

SUBSTRATE FOR MOUNTING GAS SUPPLY COMPONENTS AND METHODS THEREOF

Monolithic gas distribution manifold and various construction techniques and use cases therefor

MOVABLE GROUND RING FOR MOVABLE SUBSTRATE SUPPORT ASSEMBLY OF A PLASMA PROCESSING CHAMBER

SILICON CONTAINING CONFINEMENT RING FOR PLASMA PROCESSING APPARATUS AND METHOD OF FORMING THEREOF

Plasma Processing Devices Having Multi-Port Valve Assemblies

Silicon containing confinement ring for plasma processing apparatus and method of forming thereof

PLASMA PROCESSING CHAMBER WITH REMOVABLE BODY

Pressure controlled heat pipe temperature control plate

Movable grounding arrangements in a plasma processing chamber and methods therefor

Gas feed insert in a plasma processing chamber and methods therefor

Cam-locked showerhead electrode and assembly

Showerhead electrode

Movable ground ring for a plasma processing chamber

C-shaped confinement ring for a plasma processing chamber

Consumable isolation ring for movable substrate support assembly of a plasma processing chamber

Cam lock electrode clamp