Saurabh J. Ullal

City:

Berkeley, California

Country:

United States

Published Applications:

Last publication date:

2010-08-03

Top Assignees for applications by Saurabh J. Ullal

The entities that hold a legal rights for patent applications filed by inventor Ullal Saurabh J.:

Saurabh J. Ullal from Berkeley, US has applied for patents for these inventions. The list has both pending applications and granted patents:

In-situ pre-coating of plasma etch chamber for improved productivity and chamber condition control

In-situ pre-coating of plasma etch chamber for improved productivity and chamber condition control

In-situ cleaning of a polymer coated plasma processing chamber

InventorID:

7320703 ⎘