Erlangen
Germany
4
2006-11-07
The entities that hold a legal rights for patent applications filed by inventor Pfitzner Lothar:
Lothar Pfitzner from Erlangen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Apparatus and measurement procedure for the fast, quantitative, non-contact topographic investigation of semiconductor wafers and other mirror like surfaces
#2 | 2006-02-21Particle measurement configuration and semiconductor wafer processing device with such a configuration
#3 | 2006-02-21Method and device for optically monitoring fabrication processes of finely structured surfaces in a semiconductor production
#4 | 2005-08-16Configuration for determining a concentration of contaminating particles in a loading and unloading chamber of an appliance for processing at least one disk-like object
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