Shanghai
China
13
2018-02-15
The entities that hold a legal rights for patent applications filed by inventor CAI BoXiu:
BoXiu CAI from Shanghai, CN has applied for patents for these inventions. The list has both pending applications and granted patents:
Photolithographic mask
#2 | 2017-06-15Photolithography alignment mark structures and semiconductor structures
#3 | 2016-03-31Photolithography alignment mark structures, semiconductor structures, and fabrication method thereof
#4 | 2016-03-31Method and system for optical measurements
#5 | 2016-03-17Laser annealing device including tunable mask and method of using the same
#6 | 2016-03-03Photolithographic mask and fabrication method thereof
#7 | 2015-02-26Method and system for obtaining optical proximity correction model calibration data
#8 | 2015-02-05Photolithographic masks and fabrication method thereof
#9 | 2014-12-11Methods for monitoring source symmetry of photolithography systems
#10 | 2014-06-12Laser annealing device and method
#11 | 2014-05-15Method for detecting electron beam of scanning electron microscope and for detecting fine patterns
#12 | 2014-05-01Standard wafer and its fabrication method
#13 | 2014-05-01Method and apparatus for monitoring electron beam condition of scanning electron microscope
741886 ⎘