Eberhard Kühn

City:

Hemhofen

Country:

Germany

Published Applications:

Last publication date:

2006-05-30

Top Assignees for applications by Eberhard Kühn

The entities that hold a legal rights for patent applications filed by inventor Kühn Eberhard:

Infineon Technologies AG 4 Munich, Germany

Recent patent applications by Kühn Eberhard

Eberhard Kühn from Hemhofen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2006-05-30

US10208351

Silicon-containing resist for photolithography

#2 | 2006-03-28

US10375532

Process for increasing the etch resistance and for reducing the hole and trench width of a photoresist structure using solvent systems of low polarity

#3 | 2005-09-20

US10186648

Negative resist process with simultaneous development and aromatization of resist structures

#4 | 2005-05-17

US10233694

Process for sidewall amplification of resist structures and for the production of structures having reduced structure size

InventorID:

7421688 ⎘