Bubenreuth
Germany
3
2006-05-30
The entities that hold a legal rights for patent applications filed by inventor Lering Michael:
Michael Lering from Bubenreuth, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Installation for processing a semiconductor wafer and method for operating the installation
#2 | 2005-04-19Apparatus and method for handling, storing and reloading carriers for disk-shaped items, such as semiconductor wafers or CDs
#3 | 2005-02-22Vehicle for transporting a semiconductor device carrier to a semiconductor processing tool
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