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Inventor profile of:

Xiaoming Lu

City:

Cedar Park, Texas

Country:

United States

Published Applications:

22

Last publication date:

2026-04-02

Top Assignees for applications by Xiaoming Lu

The entities that hold a legal rights for patent applications filed by inventor Lu Xiaoming:

Recent patent applications by Lu Xiaoming

Xiaoming Lu from Cedar Park, US has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2026-04-02
US20260096383A1
Electricity

FLEXIBLE CHUCK WITH STRAIN GAUGE

 #2 | 2025-07-03
US20250216775A1
Physics

METHOD OF SHAPING A SURFACE, SHAPING SYSTEM, AND METHOD OF MANUFACTURING AN ARTICLE

 #3 | 2024-09-26
US20240321586A1
Electricity

PLANARIZATION PROCESS, PLANARIZATION SYSTEM, AND METHOD OF MANUFACTURING AN ARTICLE

 #4 | 2024-05-30
US20240178042A1
Electricity

SYSTEMS, DEVICES, AND METHODS FOR REGISTERING A SUPERSTRATE OF AN IMPRINT TOOL

 #5 | 2023-03-30
US20230095200A1
Physics

Method of shaping a surface, shaping system, and method of manufacturing an article

 #6 | 2023-01-19
US20230014261A1
Physics

Method of determining the initial contact point for partial fields and method of shaping a surface

 #7 | 2022-12-01
US20220384205A1
Electricity

Planarization process, planarization system, and method of manufacturing an article

 #8 | 2022-06-16
US20220189832A1
Electricity

Planarization apparatus, planarization process, and method of manufacturing an article

 #9 | 2022-04-28
US20220128901A1
Physics

System and method for shaping a film with a scaled calibration measurement parameter

 #10 | 2022-03-31
US20220102156A1
Electricity

Planarization apparatus including superstrate chuck with bendable periphery

 #11 | 2019-10-15
US16206642
Physics

Active metrology frame and thermal frame temperature control in imprint lithography

 #12 | 2019-08-01
US20190232533A1
Performing operations; transporting

Strain and kinetics control during separation phase of imprint process

 #13 | 2019-06-20
US20190187575A1
Physics

Alignment control in nanoimprint lithography based on real-time system identification

 #14 | 2017-10-05
US20170282439A1
Performing operations; transporting

System and methods for nanoimprint lithography

 #15 | 2017-02-16
US20170047234A1
Electricity

Imprint apparatus, and method of manufacturing article

 #16 | 2017-02-02
US20170028598A1
Performing operations; transporting

Imprint apparatus and article manufacturing method

 #17 | 2016-10-06
US20160288403A1
Performing operations; transporting

Imprint apparatus and method of manufacturing article

 #18 | 2015-05-21
US20150140149A1
Performing operations; transporting

High throughput imprint based on contact line motion tracking control

 #19 | 2014-05-01
US20140117574A1
Performing operations; transporting

Strain and Kinetics Control During Separation Phase of Imprint Process

 #20 | 2010-04-29
US20100102469A1
Performing operations; transporting

Strain and kinetics control during separation phase of imprint process

 #21 | 2010-04-22
US20100096764A1
Physics

Gas Environment for Imprint Lithography

 #22 | 2009-06-04
US20090140445A1
Performing operations; transporting

High throughput imprint based on contact line motion tracking control
InventorID:

742261 ⎘