Marcus Zehetbauer

City:

Oberkochen

Country:

Germany

Published Applications:

Last publication date:

2005-08-30

Top Assignees for applications by Marcus Zehetbauer

The entities that hold a legal rights for patent applications filed by inventor Zehetbauer Marcus:

CARL ZEISS SMT AG 1 Oberkochen, Germany

Recent patent applications by Zehetbauer Marcus

Marcus Zehetbauer from Oberkochen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2005-08-30

US9754841

Process for the decontamination of microlithographic projection exposure devices

InventorID:

7484155 ⎘