Seung Hyun Lee

SPIN ON CARBON HARDMASK COMPOSITIONS WITH LOW EVAPORATION LOSS AND PATTERNING METHOD BY USING THE SAME

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CHEMICALLY AMPLIFIED POSITIVE PHOTORESIST COMPOSITION FOR IMPROVING PATTERN PROFILE AND RESOLUTION

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RINSE SOLUTION COMPOSITION FOR EXTREME ULTRAVIOLET PHOTOLITHOGRAPHY AND PATTERN FORMATION METHOD USING SAME

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CHEMICALLY AMPLIFIED POSITIVE PHOTORESIST COMPOSITION FOR IMPROVING PATTERN PROFILE AND ENHANCING ADHESION

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CHEMICALLY-AMPLIFIED POSITIVE PHOTORESIST COMPOSITION FOR PATTERN PROFILE IMPROVEMENT AND ETCH RESISTANCE ENHANCEMENT

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SLURRY COMPOSITION FOR FINAL POLISHING OF SILICON WAFER FOR REDUCING NUMBER OF SURFACE DEFECTS AND HAZE AND FINAL POLISHING METHOD USING SAME

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SPIN-ON CARBON HARD MASK COMPOSITION WITH HIGH PLANARIZATION PERFORMANCE AND PATTERNING METHOD USING SAME

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MOLYBDENUM FILM ETCHANT COMPOSITION AND ETCHING METHOD USING SAME

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I-LINE NEGATIVE PHOTORESIST COMPOSITION FOR REDUCING HEIGHT DIFFERENCE BETWEEN CENTER AND EDGE AND REDUCING LER, AND I-LINE NEGATIVE PHOTORESIST COMPOSITION FOR IMPROVING PROCESS MARGIN

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ETCHANT COMPOSITION FOR ADJUSTING ETCHING SELECTIVITY OF TITANIUM NITRIDE FILM WITH RESPECT TO TUNGSTEN FILM, AND ETCHING METHOD USING SAME

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PROCESS SOLUTION COMPOSITION FOR EXTREME ULTRAVIOLET PHOTOLITHOGRAPHY AND PATTERN FORMING METHOD USING SAME

#12 | 2022-10-27

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PROCESS LIQUID COMPOSITION FOR PHOTOLITHOGRAPHY AND PATTERN FORMING METHOD USING SAME

#13 | 2022-08-11

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PROCESS LIQUID COMPOSITION FOR LITHOGRAPHY AND PATTERN FORMING METHOD USING SAME

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METHOD OF DETERMINING CONTINUOUS DRUG DOSE USING REINFORCEMENT LEARNING AND PHARMACOKINETIC-PHARMACODYNAMIC MODELS

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Highly thick spin-on-carbon hard mask composition and patterning method using same

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Etching pattern forming method in semiconductor manufacturing process

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Method for analyzing silicon concentration in phosphoric acid solution

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Slurry composition for polishing silicon oxide film, and polishing method using same

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Cleaning liquid composition for semiconductor wafer and cleaning method using same

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Etching composition for silicon nitride film

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Method for forming silicon or silicon compound pattern in semiconductor manufacturing process

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Process liquid for extreme ultraviolet lithography and pattern forming method using same

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Organic-inorganic hybrid photoresist processing liquid composition

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Chemically amplified positive photoresist composition for improving pattern profile

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Process solution composition for extreme ultraviolet lithography, and method for forming pattern by using same

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Process liquid composition for extreme ultraviolet lithography and pattern forming method using same

#27 | 2021-03-04

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EUV developer composition for forming photosensitive photoresist micropattern

#28 | 2020-06-18

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Cutting oil composition

#29 | 2020-06-11

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Method and composition for improving LWR in patterning step using negative tone photoresist

#30 | 2020-06-04

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Human necessities

Apparatus, method, and program for predicting hypoglycemia, and apparatus, method, and program for generating hypoglycemia prediction model

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Photoresist pattern shrinking composition and pattern shrinking method

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Composition for performing cleaning after chemical/ mechanical polishing

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High etch resistance spin-on carbon hard mask composition and patterning method using same

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Method and composition for improving LWR in patterning step using negative tone photoresist

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Chemically-amplified-type negative-type photoresist composition

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Negative photoresist composition for KRF laser, having high resolution and high aspect ratio

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Anti-reflection coating composition and anti-reflection film utilizing same

#38 | 2018-08-30

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I-line negative type photoresist composition having excellent etching resistance

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Slurry composition for CMP and polishing method using same

#40 | 2018-07-19

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Negative photoresist composition for KrF laser for forming semiconductor patterns

#41 | 2018-06-14

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High-voltage connector and high-voltage power supply connecting device having the same

#42 | 2017-01-19

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Cleaning composition for photolithography and method of forming photoresist pattern using the same

#43 | 2014-08-07

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Method of generating height information in circuit board inspection apparatus

#44 | 2014-07-17

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Human necessities

SELF-DIRECTED REHABILITATION TRAINING METHOD COMBINING BRAIN SIGNALS AND FUNCTIONAL ELECTROSTIMULATION

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