Erik LOOPSTRA

City:

Oberkochen

Country:

Germany

Published Applications:

Last publication date:

2026-04-30

Recent patent applications by LOOPSTRA Erik

Erik LOOPSTRA from Oberkochen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2026-04-30

US20260118778A1

Physics

METHOD FOR INCORPORATING TEMPERATURE-REGULATING HOLLOW STRUCTURES INTO A SUBSTRATE, IN PARTICULAR INTO A SUBSTRATE FOR AN OPTICAL ELEMENT FOR AN EUV PROJECTION EXPOSURE APPARATUS, AND PROCESSING SYSTEM THEREFOR, METHOD AND SUBSTRATE FOR PRODUCING AN OPTICAL ELEMENT, OPTICAL ELEMENT, AND SEMICONDUCTOR TECHNOLOGY APPARATUS

#2 | 2026-04-16

US20260104572A1

Physics

SUBSTRATE FOR PRODUCING AN OPTICAL ELEMENT, OPTICAL ELEMENT AND ALSO SEMICONDUCTOR TECHNOLOGY APPARATUS

InventorID:

7758662 ⎘