Yo Sakata

City:

Tokyo

Country:

Japan

Published Applications:

Last publication date:

2014-07-31

Top Assignees for applications by Yo Sakata

The entities that hold a legal rights for patent applications filed by inventor Sakata Yo:

Yo Sakata from Tokyo, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

Reflective mask blank and reflective mask, and methods for manufacturing reflective mask blank and reflective mask

Mask blank for reflection-type exposure, and mask for reflection-type exposure

Reflective mask and method for manufacturing same

InventorID:

805741 ⎘