Aalen
Germany
31
2026-03-05
The entities that hold a legal rights for patent applications filed by inventor EVA Eric:
Eric EVA from Aalen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
WORKPIECE WITH A HOLLOW STRUCTURE, METHOD FOR AT LEAST PARTIALLY FORMING A HOLLOW STRUCTURE, MIRROR, AND LITHOGRAPHY SYSTEM
#2 | 2025-11-27OPTICAL ELEMENT HAVING A POLISHING LAYER, LITHOGRAPHY APPARATUS COMPRISING THE OPTICAL ELEMENT, AND METHOD FOR PRODUCING THE OPTICAL ELEMENT
#3 | 2025-07-17MIRROR, IN PARTICULAR FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS, AND METHOD OF PROCESSING A MIRROR
#4 | 2025-05-01METHOD FOR PRODUCING A MAIN BODY OF AN OPTICAL ELEMENT FOR SEMICONDUCTOR LITHOGRAPHY, MAIN BODY, OPTICAL ELEMENT AND PROJECTION EXPOSURE APPARATUS
#5 | 2024-07-04OPTICAL ELEMENT WITH COOLING CHANNELS, AND OPTICAL ARRANGEMENT
#6 | 2024-06-13Method for producing a mirror of a microlithographic projection exposure apparatus
#7 | 2024-01-25METHOD FOR PRODUCING A MIRROR OF A LITHOGRAPHY SYSTEM
#8 | 2024-01-18METHOD FOR PRODUCING A MIRROR OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
#9 | 2023-11-23METHOD FOR PRODUCING A MULTI-PART MIRROR OF A PROJECTION ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY
#10 | 2022-09-22Optical element and lithography system
#11 | 2021-04-22Substrate for a reflective optical element
#12 | 2019-10-03Method for repairing reflective optical elements for EUV lithography
#13 | 2019-07-11Component for a mirror array for EUV lithography
#14 | 2019-06-06Reflective optical element for EUV lithography
#15 | 2017-04-20Optical manipulator, projection lens and projection exposure apparatus
#16 | 2016-05-26Method for loading a blank composed of fused silica with hydrogen, lens element and projection lens
#17 | 2014-07-10Method and apparatus for determining the absorption in a blank
#18 | 2012-08-30Lens blank and lens elements as well as method for their production
#19 | 2011-08-25METHOD FOR MANUFACTURING A LENS OF SYNTHETIC QUARTZ GLASS WITH INCREASED H2 CONTENT
#20 | 2011-04-07Optical element and method
#21 | 2010-11-25Lens blank and lens elements as well as method for their production
#22 | 2010-06-17PROJECTION LENS FOR MICROLITHOGRAPHY AND CORRESPONDING TERMINAL ELEMENT
#23 | 2009-10-15Optical element and method
#24 | 2009-02-05Optical composite material and method for its production
#25 | 2008-01-24Lens blank and lens elements as well as method for their production
#26 | 2007-11-22Method for manufacturing a lens of synthetic quartz glass with increased Hcontent
#27 | 2007-08-23Projection lens and method for performing microlithography
#28 | 2006-06-08Method and apparatus for setting optical imaging properties by means of radiation treatment
#29 | 2006-02-07Device for reducing the peak power of a pulsed laser light source
#30 | 2005-08-18Attenuating filter for ultraviolet light
#31 | 2005-06-30Projection optical system
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