Jyoetsu
Japan
11
2018-01-11
The entities that hold a legal rights for patent applications filed by inventor BIYAJIMA Yusuke:
Yusuke BIYAJIMA from Jyoetsu, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Resist underlayer film composition, patterning process, method for forming resist underlayer film, and compound for resist underlayer film composition
#2 | 2016-03-03Method for producing semiconductor apparatus substrate
#3 | 2015-04-09Method for manufacturing a resist composition
#4 | 2015-04-02Composition for forming a silicon-containing resist under layer film and patterning process
#5 | 2015-03-05Method for producing resist composition
#6 | 2014-11-13Method for producing resist composition
#7 | 2014-07-24THERMAL CROSSLINKING ACCELERATOR, POLYSILOXANE-CONTAINING RESIST UNDERLAYER FILM FORMING COMPOSITION CONTAINING SAME, AND PATTERNING PROCESS USING SAME
#8 | 2012-07-19Resist underlayer film composition and patterning process using the same
#9 | 2012-07-05Resist underlayer film composition and patterning process using the same
#10 | 2012-06-07Resist underlayer film composition and patterning process using the same
#11 | 2012-05-03Resist underlayer film composition and patterning process using the same
846500 ⎘