Tokyo
Japan
8
2019-05-30
The entities that hold a legal rights for patent applications filed by inventor Kato Kinya:
Kinya Kato from Tokyo, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Illumination optical assembly, exposure device, and device manufacturing method
#2 | 2019-05-09Illumination optical system, exposure apparatus, device production method, and light polarization unit
#3 | 2017-06-29Illumination optical system, exposure apparatus, device production method, and light polarization unit
#4 | 2017-03-30Illumination optical assembly, exposure device, and device manufacturing method
#5 | 2014-08-21Illumination optical system, exposure apparatus, device production method, and light polarization unit
#6 | 2014-07-31Catadioptric imaging lens
#7 | 2014-07-31Illumination optical assembly, exposure device, and device manufacturing method
#8 | 2011-01-20Reference sphere detecting device, reference sphere position detecting device, and three-dimensional-coordinate measuring device
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