Aalen
Germany
6
2014-07-31
The entities that hold a legal rights for patent applications filed by inventor Waldis Severin:
Severin Waldis from Aalen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Optical module for guiding a radiation beam
#2 | 2012-02-23OPTICAL MODULE FOR GUIDING A RADIATION BEAM
#3 | 2011-07-28Microlithographic projection exposure apparatus
#4 | 2011-07-28Illumination system of a microlithographic projection exposure apparatus having a temperature control device
#5 | 2011-03-17Illumination optics for EUV microlithography and related system and apparatus
#6 | 2010-10-14Mirror for guiding a radiation bundle
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