Aalen
Germany
10
2023-12-14
The entities that hold a legal rights for patent applications filed by inventor Sigel Benjamin:
Benjamin Sigel from Aalen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
METHOD AND SWAPPING TOOL
#2 | 2022-09-29DEVICE FOR CLEANING A SURFACE IN THE INTERIOR OF AN OPTICAL SYSTEM
#3 | 2019-04-25PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY INCLUDING AN ACTUATOR SYSTEM
#4 | 2016-06-16Optical component
#5 | 2015-11-05PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY INCLUDING AN ACTUATOR SYSTEM
#6 | 2013-02-14OPTICAL DEVICES HAVING KINEMATIC COMPONENTS
#7 | 2011-12-29Projection exposure apparatus for semiconductor lithography including an actuator system
#8 | 2011-08-11Optical system with aperture device having plurality of aperture elements
#9 | 2010-05-27PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHY APPARATUS AND METHOD
#10 | 2008-05-22OPTICAL DEVICES HAVING KINEMTAIC COMPONENTS
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