Ulm
Germany
5
2015-02-26
The entities that hold a legal rights for patent applications filed by inventor CLAUSS Wilfried:
Wilfried CLAUSS from Ulm, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Lithography apparatus and method for producing a mirror arrangement
#2 | 2014-10-16Reflective Optical Element for the EUV Wavelength Range, Method for Producing and for Correcting Such an Element, Projection Lens for Microlithography Comprising Such an Element, and Projection Exposure Apparatus for Microlithography Comprising Such a Projection Lens
#3 | 2013-05-02Optical arrangement for EUV lithography and method for configuring such an optical arrangement
#4 | 2013-02-14Mirror for the EUV wavelength range, substrate for such a mirror, projection objective for microlithography comprising such a mirror or such a substrate, and projection exposure apparatus for microlithography comprising such a projection objective
#5 | 2012-08-23SUBSTRATES AND MIRRORS FOR EUV MICROLITHOGRAPHY, AND METHODS FOR PRODUCING THEM
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