Aalen
Germany
13
2016-12-29
The entities that hold a legal rights for patent applications filed by inventor PAUL Hans-Jochen:
Hans-Jochen PAUL from Aalen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Optical element and optical arrangement therewith
#2 | 2016-09-15Reflective optical element, and optical system of a microlithographic projection exposure apparatus
#3 | 2016-07-07EUV mirror and optical system comprising EUV mirror
#4 | 2013-02-14Mirror for the EUV wavelength range, substrate for such a mirror, projection objective for microlithography comprising such a mirror or such a substrate, and projection exposure apparatus for microlithography comprising such a projection objective
#5 | 2012-09-06Reflective optical imaging system
#6 | 2012-08-23MIRROR FOR THE EUV WAVELENGTH RANGE, PROJECTION OBJECTIVE FOR MICROLITHOGRAPHY CROMPRISING SUCH A MIRROR, AND PROJECTION EXPOSURE APPARATUS FOR MICROLITHOGRAPHY COMPRISING SUCH A PROJECTION OBJECTIVE
#7 | 2012-05-31MIRROR FOR EUV WAVELENGTHS, PROJECTION OBJECTIVE FOR MICROLITHOGRAPHY HAVING SUCH MIRROR AND PROJECTION EXPOSURE APPARATUS HAVING SUCH PROJECTION OBJECTIVE
#8 | 2010-06-03Interference systems for microlithgraphic projection exposure systems
#9 | 2006-03-09Antireflection coating for ultraviolet light at large angles of incidence
#10 | 2005-11-22Antireflection coating for ultraviolet light at large angles of incidence
#11 | 2005-08-18Attenuating filter for ultraviolet light
#12 | 2005-07-07Optical component and coating system for coating substrates for optical components
#13 | 2005-03-08Method and coating system for coating substrates for optical components
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