Kousa HIROTA

City:

Tokyo

Country:

Japan

Published Applications:

Last publication date:

2015-02-12

Top Assignees for applications by Kousa HIROTA

The entities that hold a legal rights for patent applications filed by inventor HIROTA Kousa:

Kousa HIROTA from Tokyo, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

PLASMA PROCESSING APPARATUS

Plasma processing apparatus and plasma processing method

Plasma processing apparatus and plasma processing method

METHOD FOR SEASONING PLASMA PROCESSING APPARATUS, AND METHOD FOR DETERMINING END POINT OF SEASONING

Method for etching a sample

Semiconductor Fabrication Method and Etching System

InventorID:

921766 ⎘