Winnenden
Germany
5
2014-11-13
The entities that hold a legal rights for patent applications filed by inventor Benz Daniel:
Daniel Benz from Winnenden, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Microlithographic projection exposure apparatus
#2 | 2014-10-16Illumination system of a microlithographic projection exposure apparatus having a temperature control device
#3 | 2011-07-28Microlithographic projection exposure apparatus
#4 | 2011-07-28Illumination system of a microlithographic projection exposure apparatus having a temperature control device
#5 | 2010-10-14Mirror for guiding a radiation bundle
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