Tokyo
Japan
4
2017-02-16
The entities that hold a legal rights for patent applications filed by inventor Ooki Hiroshi:
Hiroshi Ooki from Tokyo, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Illumination optical assembly, exposure apparatus, and device manufacturing method
#2 | 2016-12-08Copy processing management system and copy processing management method
#3 | 2014-10-16Illumination optical assembly, exposure apparatus, and device manufacturing method
#4 | 2009-09-24Fluorescence Detection Using Lyman-alpha Line Illumination
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