Aalen
Germany
11
2019-05-16
The entities that hold a legal rights for patent applications filed by inventor Six Stephan:
Stephan Six from Aalen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
OPTICAL IMAGING WITH REDUCED IMMERSION LIQUID EVAPORATION EFFECTS
#2 | 2017-11-16Optical imaging with reduced immersion liquid evaporation effects
#3 | 2017-11-09MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
#4 | 2015-01-08Optical imaging with reduced immersion liquid evaporation effects
#5 | 2014-10-30MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
#6 | 2012-03-15Optical imaging with reduced immersion liquid evaporation effects
#7 | 2011-12-22Wafer chuck for EUV lithography
#8 | 2011-09-15Microlithographic projection exposure apparatus
#9 | 2009-09-17Optical arrangement for immersion lithography with a hydrophobic coating, as well as projection exposure apparatus comprising the same
#10 | 2008-12-11Optical element, projection lens and associated projection exposure apparatus
#11 | 2008-12-04Microlithographic projection exposure apparatus
951482 ⎘