Alexander Vogler

City:

Aalen

Country:

Germany

Published Applications:

Last publication date:

2024-03-14

Top Assignees for applications by Alexander Vogler

The entities that hold a legal rights for patent applications filed by inventor Vogler Alexander:

Carl Zeiss SMT GmbH 7 Oberkochen, Germany

Recent patent applications by Vogler Alexander

Alexander Vogler from Aalen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2024-03-14

US20240085783A1

Physics

OPTICAL DEVICE, METHOD FOR ADJUSTING A SETPOINT DEFORMATION AND LITHOGRAPHY SYSTEM

#2 | 2023-07-20

US20230229092A1

Physics

ADAPTIVE OPTICAL ELEMENT FOR MICROLITHOGRAPHY

#3 | 2023-07-20

US20230228798A1

Physics

METHOD AND DEVICE FOR MEASURING ACTUATORS IN A PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY

#4 | 2021-03-18

US20210080244A1

Physics

Measuring assembly for the frequency-based determination of the position of a component

#5 | 2019-11-28

US20190361362A1

Physics

Assembly in a microlithographic projection exposure apparatus

#6 | 2017-09-14

US20170261859A1

Physics

Arrangement for actuating at least one optical element in an optical system

#7 | 2015-07-16

US20150198892A1

Physics

Arrangement for actuating at least one optical element in an optical system

#8 | 2014-11-27

US20140346909A1

Electricity

Lithography device with eddy-current brake

#9 | 2012-06-07

US20120138401A1

Physics

Damping device

InventorID:

980654 ⎘