Rumen Iliew

City:

Oberkochen

Country:

Germany

Published Applications:

Last publication date:

2026-04-09

Top Assignees for applications by Rumen Iliew

The entities that hold a legal rights for patent applications filed by inventor Iliew Rumen:

Rumen Iliew from Oberkochen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

METHOD FOR MANUFACTURING A PROJECTION LENS, PROJECTION LENS, PROJECTION EXPOSURE SYSTEM, AND PROJECTION EXPOSURE METHOD

Projection Lens for EUV Microlithography, Film Element and Method for Producing a Projection Lens Comprising a Film Element

Microlithographic apparatus

Mirror arrangement for an EUV projection exposure apparatus, method for operating the same, and EUV projection exposure apparatus

Reflective optical element

Projection lens for EUV microlithography, film element and method for producing a projection lens comprising a film element

InventorID:

981455 ⎘