DUST-PROOF AND VIBRATION-PROOF COVER AND METHOD OF MANUFACTURING CONNECTING ELEMENT THEREFOR

Description

CROSS-REFERENCE TO RELATED APPLICATION

This application is a continuation-in-part of U.S. patent application Ser. No. 18/932,207, filed Oct. 30, 2024, the content of which is hereby incorporated by reference in its entirety for all purposes.

BACKGROUND OF THE DISCLOSURE

1. Field of Disclosure

The invention relates to a cover, and more particularly to a dust-proof and vibration-proof cover and method of manufacturing a connecting element therefor.

2. Related Art

Current vacuum pumps, such as turbomolecular vacuum pumps, can drive a rotor connected to it to perform a vacuum pumping process. The center of the rotor is recessed toward the direction of the turbomolecular vacuum pump to form a locking space, so that the rotor can be assembled with the turbomolecular vacuum pump through fixing elements such as bolts. However, when the turbomolecular vacuum pump is used in etching processes in wafers or electronic substrates, the dust particles generated during processing are prone to accumulate in the locking space, and the airflow generated by the rotor during processing can easily cause the dust particles in the locking space to float back to the processing area along with the airflow, which can cause contamination of the wafers or electronic substrates in the processing area. Therefore, in order to prevent the dust particles from accumulating in the locking chamber, a conventional technology discloses a product with a rotor cover designed to close a locking chamber above a rotor, in which the rotor cover is penetrated from the outside to the inside with bolts that are locked to a bottom side of the locking chamber. However, there is still a small amount of space for dust particles to accumulate in the bolt locking area, so the assembled connection of the rotor cover is not flawless, and bolt locking can easily overly force the rotor cover, causing the rotor cover to deform and break after the rotor rotates at high speed.

SUMMARY OF THE DISCLOSURE

In addition, in the traditional bolt locking techniques, when a rotor cover rotates at high speed, rotational vibration is likely to occur, causing a rotor's rotation center of gravity to shift or lose a sealing effect. If bolts extending from a bottom of the rotor cover are used to connect with a bottom side of a locking chamber, the rotor cover will still produce rotational vibration and/or wear. In view of this, one object of the invention is to provide a dust-proof and vibration-proof cover capable of overcoming the above long-standing but unsolvable technical problems.

The disclosure discloses a dust-proof and vibration-proof cover, the dust-proof and vibration-proof cover being installed on a vacuum pump, a rotating shaft being protrudingly disposed above the vacuum pump, a rotor being sleeved on the rotating shaft, a locking chamber being recessed at a center of the rotor, a center of the locking chamber being connected to the rotating shaft, the dust-proof and vibration-proof cover comprising: a covering element, the covering element having a top surface; and a connecting element, a first end of the connecting element being connected to a bottom surface of the covering element, and a second end of the connecting element being configured to detachably connect to the rotating shaft, wherein at least a portion of the connecting element presents a continuous gradient change in a physical property between the first end and the second end of the connecting element, wherein the physical property is selected from a group consisting of hardness, rigidity, volume, density, thermal expansion and magnetism, wherein the physical property of the portion of the connecting element adjacent to the first end matches the physical property of the covering element, and the physical property of the portion of the connecting element adjacent to the second end matches the physical property of the rotating shaft.

The disclosure discloses a method of manufacturing a connecting element for a dust-proof and vibration-proof cover of a vacuum pump, the connecting element having a first end and a second end, the method comprising the steps of: (a) providing at least one base material; (b) forming the connecting element from the at least one base material while applying a continuous gradient control along a length axis of the connecting element, from the first end toward the second end, wherein the continuous gradient control comprises applying a continuous gradient of energy treatment or controlling a continuous gradient in a mixing ratio of the at least one base material; and (c) thereby forming a continuous gradient in at least one physical property of the connecting element, the physical property being selected from a group consisting of hardness, rigidity, volume, density, thermal expansion and magnetism.

Based on the above, the dust-proof and vibration-proof cover according to the disclosure could not only keep the locking chamber of the vacuum pump sealed, but also could produce a center of gravity adjustment effect (or counterweight effect) through the connecting element provided with the matching element to reduce a rotational vibration phenomenon of the covering element of the dust-proof and vibration-proof cover, and by reducing a hardness difference, wear of the connecting element when connected to the rotating shaft could be reduced.

In order to enable the examiner to have a further understanding and recognition of the technical features of the disclosure, preferred embodiments in conjunction with detailed explanation are provided as follows.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a perspective view of a dust-proof and vibration-proof cover of the disclosure.

FIG. 2 is a cross-sectional exploded view of the dust-proof and vibration-proof cover of the disclosure.

FIG. 3 is a cross-sectional view of the dust-proof and vibration-proof cover of the disclosure installed on a turbomolecular vacuum pump.

FIG. 4 is a top view of the dust-proof and vibration-proof cover of the disclosure with a side being a completely curved surface.

FIG. 5 is a top view of the dust-proof and vibration-proof cover of the disclosure with a side provided with an auxiliary clamping area, wherein the auxiliary clamping area is a flat area.

FIG. 6 is a top view of the dust-proof and vibration-proof cover of the disclosure with a side provided with the auxiliary clamping area, wherein the auxiliary clamping area is a recessed area.

FIG. 7 is a bottom perspective view of the dust-proof and vibration-proof cover of the disclosure with a fixture being a ring body.

FIG. 8 is a bottom perspective view of the dust-proof and vibration-proof cover of the disclosure with the fixture being a rod body.

FIG. 9 is a bottom perspective view of the dust-proof and vibration-proof cover of the disclosure with the fixture being a plate body.

FIG. 10 is a cross-sectional exploded view of the dust-proof and vibration-proof cover of the disclosure, wherein the connecting element is provided with several portions presenting a continuous gradient change.

FIG. 11 is a cross-sectional view of the dust-proof and vibration-proof cover of the disclosure installed on a turbomolecular vacuum pump, wherein the connecting element is a single-piece extension rod.

FIG. 12 is a cross-sectional view of the dust-proof and vibration-proof cover of the disclosure installed on a turbomolecular vacuum pump, wherein the covering element is coated with a fluorine coating layer.

DETAILED DESCRIPTION OF THE DISCLOSURE

In order to understand the technical features, content and advantages of the disclosure and its achievable efficacies, the disclosure is described below in detail in conjunction with the figures, and in the form of embodiments, the figures used herein are only for a purpose of schematically supplementing the specification, and may not be true proportions and precise configurations after implementation of the disclosure; and therefore, relationship between the proportions and configurations of the attached figures should not be interpreted to limit the scope of the claims of the disclosure in actual implementation. In addition, in order to facilitate understanding, the same elements in the following embodiments are indicated by the same referenced numbers. And the size and proportions of the components shown in the drawings are for the purpose of explaining the components and their structures only and are not intending to be limiting.

Unless otherwise noted, all terms used in the whole descriptions and claims shall have their common meaning in the related field in the descriptions disclosed herein and in other special descriptions. Some terms used to describe in the present disclosure will be defined below or in other parts of the descriptions as an extra guidance for those skilled in the art to understand the descriptions of the present disclosure.

The terms such as “first”, “second”, “third” and “fourth” used in the descriptions are not indicating an order or sequence, and are not intending to limit the scope of the present disclosure. They are used only for differentiation of components or operations described by the same terms.

Moreover, the terms “comprising”, “including”, “having”, and “with” used in the descriptions are all open terms and have the meaning of “comprising but not limited to”.

Please refer to FIGS. 1 and 2, FIG. 1 is a perspective view of a dust-proof and vibration-proof cover of the disclosure, and FIG. 2 is a cross-sectional exploded view of the dust-proof and vibration-proof cover of the disclosure. The disclosure is a dust-proof and vibration-proof cover 10 applicable for detachably installing on a vacuum pump. The dust-proof and vibration-proof cover 10 could be used as a dust-proof cover or a vibration-proof cover. The dust-proof and vibration-proof cover 10 is, for example, a dust-proof and vibration-proof cover of the vacuum pump, such as a turbomolecular vacuum pump 100. As shown in FIG. 3, a rotating shaft 102 is protrudingly disposed above the turbomolecular vacuum pump 100. A locking chamber 112 is recessed at a center of a rotor 110. The rotor 110 is sleeved on the rotating shaft 102, and the rotating shaft 102 is connected to a center of the locking chamber 112 of the rotor 110, so that the rotor 110 could be sleeved on the rotating shaft 102. Wherein the rotating shaft 102 could be fixed to the center of the locking chamber 112 of the rotor 110 through, for example, threaded fitting or auxiliary of other components. Wherein an outer surface of the rotating shaft 102 has threads, for example, and the other components mentioned above could be, for example, nuts, and the rotating shaft 102 is locked to the locking chamber 112 of the rotor 110 by screwing the nuts into the threads. Alternatively, a bolt (not shown in the figures) could be penetrated from top to bottom through the locking chamber 112 of the rotor 110 and screwed into a screw hole (not shown in the figures) formed concavely in a top surface of the rotating shaft 102. In other words, the disclosure is not limited to any methods used to fix the rotating shaft 102 to the locking chamber 112 of the rotor 110, as long as the rotating shaft 102 is capable of driving the rotor 110 to rotate, it is applicable to the disclosure and falls within the scope of protection claimed by the disclosure.

The dust-proof and vibration-proof cover 10 of the disclosure comprises a covering element 20 and a connecting element 30. The covering element 20 is used to cover the locking chamber 112 of the rotor 110 to prevent process particles of a gas in a process chamber extracted by the turbomolecular vacuum pump 100 from being deposited or accumulated in the locking chamber 112. A shape of a top surface of the covering element 20 of the dust-proof and vibration-proof cover 10 of the disclosure is, for example, conical, hemispherical or flat, but is not limited thereto. The covering element 20 has a smooth curved surface. At least either a side wall or the top surface of the covering element 20 is a smooth curved surface, wherein preferably both the side wall and the top surface of the covering element 20 are smooth curved surfaces, so as to effectively guide an airflow and stabilize it. In addition, the side wall and the top surface of the covering element 20 are not limited to completely curved surfaces, that is, the side wall or the top surface of the covering element 20 could also have a flat area or a recessed area, for example. A shape of a bottom surface of the covering element 20 could be, for example, conical, hemispherical or flat. In addition, the top surface and the bottom surface of the covering element 20 are not limited to substantially corresponding to each other, but have a same shape. For example, the top surface and the bottom surface of the covering element 20 do not correspond to each other and have different shapes. In other words, as long as the dust-proof and vibration-proof cover 10 is capable of guiding an airflow and a center of its bottom surface could be connected to the rotating shaft 102 of the turbomolecular vacuum pump 100 through the connecting element 30, it is applicable to the disclosure and falls within the scope of protection claimed by the disclosure.

Two ends 31a, 31b of the connecting element 30 of the dust-proof and vibration-proof cover 10 of the disclosure are used to respectively connect with a center of the bottom surface of the covering element 20 of the dust-proof and vibration-proof cover 10 and a center of the top surface of the rotating shaft 102 of the turbomolecular vacuum pump 100, so that the covering element 20 is capable of detachably covering the locking chamber 112 of the turbomolecular vacuum pump 100. The bottom surface of the dust-proof and vibration-proof cover 10 of the disclosure is capable of optionally detachably and directly sealing the locking chamber 112, and for example, airtightly sealing the locking chamber 112. Alternatively, the bottom surface of the dust-proof and vibration-proof cover 10 of the disclosure could optionally be provided with an additional sealing gasket 25. When the covering element 20 detachably covers the locking chamber 112 of the rotor 110, the sealing gasket 25 is located between the covering element 20 and the locking chamber 112 of the rotor 110, thereby enhancing an airtight sealing effect.

One feature of the disclosure is that the connecting element 30 comprises an extension rod 32 and a matching element 34. The matching element 34 is, for example, a rod body, but is not limited thereto. The matching element 34 could also, for example, cover a second end 32b of the extension rod 32, or a second end 34b of the matching element 34 is connected or screwed to the second end 32b of the extension rod 32, thereby the extension rod 32 and the matching element 34 jointly form the rod-shaped connecting element 30. A first end 32a of the extension rod 32 is integrally connected or detachably connected to the bottom surface of the covering element 20, such as the center of the bottom surface. The above-mentioned integral connection method could be, for example, integrally formed, but is not limited thereto. If the first end 32a of the extension rod 32 is integrally connected to the bottom surface of the covering element 20, then materials of the extension rod 32 and the covering element 20 are the same. If the first end 32a of the extension rod 32 is detachably connected to the bottom surface of the covering element 20, then materials of the extension rod 32 and the covering element 20 could be the same or different. Materials of the extension rod 32 and the covering element 20 are preferably matched to each other, but are not limited thereto. The above-mentioned detachable connection method could be, for example, screw connection, but is not limited thereto. The two ends of the connecting element 30 are respectively connected to the covering element 20 and the rotating shaft 102 via the extension rod 32 and the matching element 34. In one implementation mode, the second end 32b of the extension rod 32 is provided with the matching element 34, wherein the matching element 34 could, for example, cover the second end 32b of the extension rod 32 to jointly form a first bolt 35, wherein the connecting element 30 is connected to the rotating shaft 102 with the first bolt 35. Alternatively, in another implementation mode, the second end 34b of the matching element 34 is connected to the second end 32b of the extension rod 32, for example, via a second bolt 37, and the first end 34a of the matching element 34 has the first bolt 35, wherein the connecting element 30 is connected to the rotating shaft 102 with the first bolt 35. Alternatively, in another implementation mode, the second end 34b of the matching element 34 is screwed into a second screw hole 33 of the second end 32b of the extension rod 32, for example, through the second bolt 37, and the first end 34a of the matching element 34 has the first bolt 35, wherein the connecting element 30 is connected to the rotating shaft 102 with the first bolt 35. Wherein the first bolt 35 could, for example, have a clamping area 38. The clamping area 38 could be a flat surface. Wherein a user could clamp the clamping area 38, for example, with a clamp, thereby screwing the second bolt 37 of the matching element 34 into the second screw hole 33 of the second end 32b of the extension rod 32.

In order to prevent the dust-proof and vibration-proof cover 10 from rotational vibration phenomenon such as shaking or swinging due to high center of gravity when the turbomolecular vacuum pump 100 rotates at high speed, the covering element 20 and the connecting element 30 are preferably made of lightweight materials such as aluminum or aluminum alloy. The rotating shaft 102 of the turbomolecular vacuum pump 100 is usually made of corrosion-resistant and high-hardness materials such as stainless steel or nickel plating. However, because a hardness of aluminum or aluminum alloy is lower than that of stainless steel, if the extension rod 32 made of aluminum or aluminum alloy is directly screwed to the rotating shaft 102 made of stainless steel or nickel-plated material, it is prone to wear and tear or chipping. Therefore, another feature of the disclosure is that the connecting element 30 has the extension rod 32 and the matching element 34, wherein the extension rod 32 is preferably made of a material with a lighter weight but a lower hardness such as aluminum or aluminum alloy, and the matching element 34 is preferably made of high-hardness materials such as nickel-plated metal (such as nickel-plated aluminum or nickel-plated aluminum alloy) or stainless steel. Therefore, the disclosure is capable of simultaneously avoiding rotational vibration of the covering element 20 and avoiding wear and tear or chipping of the connecting element 30. Wherein a length ratio of the matching element 34 to the extension rod 32 ranges from, but is not limited to, about 1:7 to about 7:1, and is preferably about 1:7. The matching element 34 of the connecting element 30 of the disclosure is connected between the second end 32b of the extension rod 32 and the rotating shaft 102, thereby reducing a physical property difference between the extension rod 32 of the connecting element 30 and the rotating shaft 102, and providing a center of gravity adjustment effect to reduce a rotational vibration phenomenon of the covering element 20 when rotating at high speed. The physical property mentioned in the disclosure is, for example, but not limited to, selected from a group consisting of hardness, rigidity, volume, density, thermal expansion and magnetism. In addition, the disclosure is capable of further adjusting vibration changes (such as vibration changes of the top surface and the bottom surface) of the covering element 20 correspondingly by adjusting a length ratio of the matching element 34 and the extension rod 32, so that vibration changes (such as vibration changes of the top surface and the bottom surface) of the covering element 20 are less than a target value, wherein the target value is approximately 15 μm.

Taking the embodiment in which the matching element 34 is screwed to the extension rod 32 as an example, wherein the first end 34a of the matching element 34 of the disclosure is detachably connected to the rotating shaft 102 of the turbomolecular vacuum pump 100, and the second end 34b of the matching element 34 is detachably provided at the second end 32b of the extension rod 32. For example, a top end of the rotating shaft 102 of the turbomolecular vacuum pump 100 is recessed to form a first screw hole 104, the second end 32b of the extension rod 32 of the dust-proof and vibration-proof cover 10 is recessed to form the second screw hole 33, the first end 34a of the matching element 34 is the first bolt 35, and the second end 34b of the matching element 34 is the second bolt 37. The first bolt 35 of the matching element 34 is used to screw to the first screw hole 104 of the rotating shaft 102, and the second bolt 37 of the matching element 34 is used to screw to the second screw hole 33 of the extension rod 32. Wherein a length ratio of the first bolt 35 of the matching element 34 to the extension rod 32 ranges from about 1:7 to about 7:1, and is preferably about 1:7. A physical property (e.g., hardness) of the first end 34a of the matching element 34 is different from a physical property (e.g., hardness) of the second end 34b of the matching element 34.

Wherein the connecting element 30 of the disclosure is, for example, a columnar rod. For example, a diameter of the extension rod 32 is substantially the same as a diameter of the matching element 34, thereby effectively avoiding increasing a weight of the connecting element 30. A diameter of the first bolt 35 of the matching element 34 is, for example, substantially larger than a diameter of the second bolt 37, a diameter of the first bolt 35 corresponds to a diameter of the first screw hole 104 of the rotating shaft 102, and a diameter of the second bolt 37 corresponds to a diameter of the second screw hole 33 of the extension rod 32. Wherein diameters of the second end 32b of the extension rod 32 and the first end 34a of the matching element 34 are, for example, substantially the same.

Since the first end 34a of the matching element 34 is screwed into the first screw hole 104 recessedly formed by the top end of the rotating shaft 102, a physical property (for example, hardness) of the first end 34a of the matching element 34 matches a physical property (for example, hardness) of the rotating shaft 102. Wherein a physical property (for example, hardness) of the first end 34a of the matching element 34 is preferably close to a physical property (for example, hardness) of the rotating shaft 102, and is preferably substantially the same, so as to reduce a physical property difference (for example, difference in hardness) between the extension rod 32 and the rotating shaft 102. Since the matching element 34 is detachably screwed to the second end 32b of the extension rod 32 with the second end 34b, a physical property (for example, hardness) of the second end 34b of the matching element 34 matches a physical property (for example, hardness) of the extension rod 32. Wherein a physical property (for example, hardness) of the second end 34b of the matching element 34 is preferably close to a physical property (for example, hardness) of the extension rod 32, and is preferably substantially the same, so as to reduce a physical property difference (for example, difference in hardness) between the matching element 34 and the extension rod 32. However, the disclosure is not limited thereto, a physical property (e.g., hardness) of the second end 34b of the matching element 34 could also be different from, for example, greater or smaller than, a physical property (e.g., hardness) of the second end 32b of the extension rod 32, as long as a physical property (e.g., hardness) of the first end 34a of the element 34 is similar to or the same as a physical property (e.g., hardness) of the rotating shaft 102, a physical property difference (e.g., hardness difference) between the connecting element 30 and the rotating shaft 102 could be reduced, for example, reducing wear and tear. Similarly, the matching element 34 of the disclosure could also be replaced with a physical property used to match other physical properties, such as rigidity, volume, density, thermal expansion, magnetism or any combinations thereof, so as to reduce a physical property difference between the connecting element 30 and the rotating shaft 102. It is preferable to minimize a physical property difference between the connecting element 30 and the rotating shaft 102. In other words, a physical property (e.g., hardness) of the first end 34a of the matching element 34 of the disclosure is different from a physical property (e.g., hardness) of the second end 34b of the matching element 34. For example, a hardness of the first end 34a of the matching element 34 is greater than a hardness of the second end 34b of the matching element 34. The matching element 34 of the disclosure is capable of reducing a difference in physical property between two components (such as the connecting element 30 and the rotating shaft 102) with different physical properties by matching two sides respectively, thereby reducing wear and rotational vibration.

Thereby, when the rotating shaft 102 of the turbomolecular vacuum pump 100 rotates at high speed, the dust-proof and vibration-proof cover 10 of the disclosure could not only keep the locking chamber 112 of the turbomolecular vacuum pump 100 sealed, but also the connecting element 30 of the dust-proof and vibration-proof cover 10 is provided with the matching element 34, so a center of gravity adjustment effect could be produced by the matching element 34 to reduce a rotational vibration phenomenon of the covering element 20 of the dust-proof and vibration-proof cover 10, and by reducing a hardness difference, wear produced when the connecting element 30 is connected to the rotating shaft 102 could be reduced.

A disassembly direction of the matching element 34 and the extension rod 32 is, for example, opposite to a rotating direction of the rotating shaft 102, and an installation direction of the matching element 34 and the extension rod 32 is, for example, the same as a rotating direction of the rotating shaft 102, thereby preventing the dust-proof and vibration-proof cover 10 from deflecting when the rotating shaft 102 rotates. Similarly, a disassembly direction of the matching element 34 and the rotating shaft 102 is, for example, opposite to a rotating direction of the rotating shaft 102, and an installation direction of the matching element 34 and the rotating shaft 102 is, for example, the same as a rotating direction of the rotating shaft 102, thereby preventing the dust-proof and vibration-proof cover 10 from deflecting when the rotating shaft 102 rotates. However, the above disassembly and installation directions are merely examples and are not intended to limit the disclosure.

In other words, the dust-proof and vibration-proof cover 10 of the disclosure is capable of reducing wear and tear or chipping that could occur due to a difference in material hardness between the connecting element 30 and the rotating shaft 102, and through weight adjustment, for example, reducing a center of gravity height of the connecting element 30, rotational vibration phenomenon caused by the covering element 20 of the dust-proof and vibration-proof cover 10 could be reduced when the rotating shaft 102 of the turbomolecular vacuum pump 100 is operating at high speed, and for example, vibration changes of the top surface and bottom surface of the covering element 20 could be less than a target value. In actual operation, when a rotation speed of the rotating shaft 102 reaches about 27,660 rpm to 27,780 rpm, the above target value could be about 15 μm. In addition, when a user locks the dust-proof and vibration-proof cover 10 to the turbomolecular vacuum pump 100, the above-mentioned wear and tear or chipping phenomenon will cause the covering element 20 of the dust-proof and vibration-proof cover 10 to deflect, resulting in rotational vibration, so the dust-proof and vibration-proof cover 10 of the disclosure is capable of providing dust-proof and vibration-proof efficacies.

In addition, the dust-proof and vibration-proof cover 10 of the disclosure further comprises a fixture 60. The fixture 60 is used to clamp the covering element 20 of the dust-proof and vibration-proof cover 10. By rotating the fixture 60, the covering element 20 could be driven to rotate. One end of the fixture 60 is recessed to form a clamping space 62, and the clamping space 62 has a clamping element 64. When a user covers the dust-proof and vibration-proof cover 10 with the fixture 60, and when the covering element 20 is placed in the clamping space 62 of the fixture 60, the clamping element 64 of the fixture 60 is capable of firmly holding a surface of the covering element 20. Therefore, by rotating the fixture 60 clockwise or counterclockwise, the dust-proof and vibration-proof cover 10 could be driven to rotate, so that the dust-proof and vibration-proof cover 10 could be installed on the rotating shaft 102 or the dust-proof and vibration-proof cover 10 could be dismounted. Wherein the clamping element 64 is, for example, a plate body, a rod body or a ring body. In addition, the clamping element 64 could be, for example, fixedly or detachably disposed in the clamping space 62 of the fixture 60, or the clamping element 64 could also be, for example, repositionably disposed in the clamping space 62 of the fixture 60. For example, the clamping element 64 could be repositionably disposed in the clamping space 62 of the fixture 60 by an elastic force of a spring or an elastic force of the clamping element 64 itself, thereby firmly holding a surface of the covering element 20.

Wherein the side wall or the top surface of the covering element 20 could be completely curved (see FIG. 4), that is, it does not have a flat area or a recessed area. Alternatively, a curved surface of the side wall or the top surface of the covering element 20 could further have an auxiliary clamping area, such as a flat area 22 (see FIG. 5) or a recessed area 24 (see FIG. 6). When the covering element 20 is placed in the clamping space 62 of the fixture 60, the clamping element 64 is used to firmly hold the auxiliary clamping area of the covering element 20, such as the flat area 22 or the recessed area 24. By rotating the fixture 60, the dust-proof and vibration-proof cover 10 is driven to rotate. Wherein the clamping element 64 is, for example, a plate body (see FIG. 9), a rod body (see FIG. 8) or a ring body (see FIG. 7). For example, the clamping element 64 could be a plate, a rod or a ring disposed on an inner surface of the clamping space 62 of the fixture 60, wherein the plate, the rod or the ring is made of, for example, rubber or metal, and the metal is, for example, aluminum, aluminum alloy or stainless steel. The fixture 60 is capable of tightly abutting against the side wall of the covering element 20 by a fastening force of the rubber plate, rod or ring, so as to drive the dust-proof and vibration-proof cover 10 to rotate. Alternatively, a shape of the plate, the rod or the ring on the inner surface of the clamping space 62 could, for example, correspond to the flat area 22 or the recessed area 24 on the curved surface of the side wall of the covering element 20, thereby the clamping element 64 of the fixture 60 could be tightly attached to the flat area 22 or the recessed area 24 on the curved surface of the covering element 20 to drive the dust-proof and vibration-proof cover 10 to rotate.

Based on the above, the dust-proof and vibration-proof cover according to the disclosure could not only keep the locking chamber of the vacuum pump sealed, but also could produce a center of gravity adjustment effect (or counterweight effect) through the connecting element provided with the matching element to reduce a rotational vibration phenomenon of the covering element of the dust-proof and vibration-proof cover, and by reducing a hardness difference, wear of the connecting element when connected to the rotating shaft could be reduced.

“Abrupt interface” in physical properties may be formed at their junction. Under the harsh environment of high-speed rotation and vibration of the vacuum pump, such an abrupt change in material properties may lead to a “Stress Concentration” phenomenon, causing the junction point to become a potential structural weak point, thereby increasing the risk of fatigue damage or affecting the vibration-proof effect.

To overcome the potential problems brought by this “abrupt” gradient, a further improved embodiment of the disclosure provides a connecting element design with a continuous gradient change, as shown in FIG. 10 to FIG. 12.

In one embodiment, a dust-proof and vibration-proof cover is provided, the dust-proof and vibration-proof cover being installed on a vacuum pump 100. A rotating shaft 102 is protrudingly disposed above the vacuum pump 100, a rotor 110 is sleeved on the rotating shaft 102. A locking chamber 112 is recessed at a center of the rotor 110, a center of the locking chamber 112 is connected to the rotating shaft 102.

This dust-proof and vibration-proof cover comprises: a covering element 20, the covering element 20 having a top surface 21; and a connecting element 30, a first end 31a of the connecting element 30 being integrally or detachably connected to a bottom surface of the covering element 20, and a second end 31b of the connecting element 30 being configured to detachably connect to the rotating shaft 102.

In this embodiment, at least a portion P of the connecting element 30 presents a continuous gradient change in at least one physical property between the first end and the second end of the connecting element 30. Wherein, the physical property of the portion P of the connecting element 30 adjacent to the first end 31a matches the physical property of the covering element 20, and wherein the physical property of the portion P of the connecting element 30 adjacent to the second end 31b matches the physical property of the rotating shaft 102. By means of this smooth gradient transition, the aforementioned stress concentration problem could be effectively eliminated. Wherein, as shown in FIGS. 10 to 12, the portion(s) P could be one or more parts of the connecting element 30 or the entirety of the connecting element 30. The portion(s) P with continuous gradient change are preferably located at the junction between two layers with different physical properties.

In a variation of the above embodiment, as shown in FIG. 10, the connecting element 30 comprises: an extension rod 32 connected to the covering element 20; and a matching element 34 connected between the extension rod 32 and the rotating shaft 102, wherein the portion of the connecting element 30 presenting the continuous gradient change comprises at least the matching element 34, and optionally further comprises the extension rod 32. Regarding the matching element 34, the physical property of the portion P of the connecting element 30 adjacent to the second end 34b of the matching element 34 matches the physical property of the extension rod 32 (or the second end 32b thereof), and wherein the physical property of the portion P of the connecting element 30 adjacent to the first end 34a of the matching element 34 matches the physical property of the rotating shaft 102. In the embodiment where the extension rod 32 also presents the continuous gradient change, the physical property of the portion P adjacent to the second end 32b of the extension rod 32 matches the physical property of the second end 34b of the matching element 34, and/or the physical property of the portion P adjacent to a first end 32a of the extension rod 32 matches the physical property of the covering element 20.

In another variation, the connecting element 30 is a single-piece extension rod 32, as shown in FIGS. 11 to 12, wherein the portion of the connecting element 30 presenting the continuous gradient change is the extension rod 32 itself.

Regarding the physical property, in one embodiment, the at least one physical property presenting the continuous gradient change is hardness, and a density of the at least a portion of the connecting element is substantially constant. For example, this hardness gradient may be applied in embodiments using a steel alloy (e.g., stainless steel) as the “single base material”. This embodiment is particularly applicable to heat-treatable metallic alloys. The “single base material” could thus be a hardenable stainless steel (e.g., Martensitic Stainless Steel such as AISI 420 or AISI 440C), a medium/high-carbon alloy steel (e.g., 4140 alloy steel or 1045 medium-carbon steel), or a titanium alloy (e.g., Ti-6Al-4V).

As described in the method embodiments below, an energy treatment (e.g., induction heating, laser hardening, or electron beam heating) could be applied to the single base material in its solid state to form a continuous gradient of microstructure in the stainless steel base material, such as transitioning from a Pearlite structure at one end to a Martensite structure at the other end, thereby achieving a continuous change in hardness within a single component.

For example, by applying a continuous gradient of induction hardening, a high-power or slow-moving treatment could be applied adjacent to the second end 31b (to match the high-hardness rotating shaft), causing a transition to a high-hardness Martensite structure. Conversely, a low-power or fast-moving treatment is applied adjacent to the first end 31a (to match the lower-hardness covering element), allowing it to retain its original softer Pearlite or tempered structure. A progressive variation of the energy input between the two ends thus creates the desired hardness gradient while maintaining a substantially constant density. This progressive variation of the energy input is not limited to a linear function. For example, the energy input could be controlled to follow a non-linear function, such as a sigmoid (S-shaped) curve or an exponential curve, to create a specific hardness profile that more precisely matches and eliminates stress concentrations, particularly at the junctions adjacent to the first and second ends.

In another embodiment, the physical property presenting the continuous gradient change is density, and a hardness of the portion of the connecting element is substantially constant. Specifically, the continuous gradient change in density is a continuous gradient change in effective density resultant from a continuous gradient in porosity of the portion of the connecting element. For example, this porosity gradient may be applied in an additive manufacturing (AM) process, such as Selective Laser Melting (SLM) or Direct Metal Laser Sintering (DMLS). In this embodiment, the “single base material” may be provided in powdered form. Beyond the previously mentioned powdered aluminum alloy (such as AlSi10Mg), this single base material may also be a powdered titanium alloy (such as Titanium-6Aluminum-4Vanadium, Ti-6Al-4V) or a powdered stainless steel (such as 316L or 17-4 PH).

In such an AM process, the porosity gradient (and thus the effective density gradient) is achieved by precisely controlling the energy input (e.g., laser power and scan speed) at different locations. For instance, a high energy density may be applied adjacent to the second end 31b to achieve full densification (low porosity, high effective density), while the energy density is progressively lowered toward the first end 31a to intentionally create controlled micro-porosity (high porosity, low effective density). This control of energy density, and thus the resulting porosity gradient, may be configured to follow a linear function. Alternatively, it may follow a non-linear function, such as a sigmoid curve or exponential curve, to create a specific density profile that optimally counteracts the rotational vibration and stress distribution at high speeds.

Furthermore, to ensure the hardness of the base material remains substantially constant, the entire connecting element, after the AM process, could be subjected to a uniform post-heat treatment (e.g., annealing or stress relief). This ensures that the metallic base matrix of the single base material has a substantially constant hardness throughout the component, isolating the density as the primary gradient property.

In yet another embodiment, the physical property presenting the continuous gradient change comprises both hardness and density. This dual-gradient objective may be achieved, for example, through at least two distinct approaches: In a first approach, the portion of the connecting element (30) is a Functionally Graded Material (FGM) comprising a continuous gradient in a mixing ratio between a first base material having a first hardness and a first density, and a second base material having a second hardness and a second density. For example, referring to the previous embodiments, the material of the extension rod 32 is preferably aluminum or aluminum alloy, and the material of the rotating shaft 102 is stainless steel. Therefore, the “first base material” described herein may be, for example, an aluminum alloy, and the “second base material” may be, for example, stainless steel. The Functionally Graded Material (FGM) is thus a gradient composite material that continuously varies between the two (e.g., an Aluminum Alloy-Stainless Steel (Al-SUS) gradient composite) to match the physical properties at both ends. For example, in a non-limiting embodiment, the mixing ratio may present a linear gradient along a length of the element, transitioning from 100% of the first base material (e.g., aluminum alloy) adjacent to the first end to 100% of the second base material (e.g., stainless steel) adjacent to the second end. In other embodiments, the gradient may be non-linear, such as following a sigmoid (S-shaped) curve or an exponential curve, to optimize stress distribution for a particular application. In a second alternative approach, this dual gradient of hardness and density could be achieved using a single base material, particularly through an Additive Manufacturing (AM) process. By precisely controlling the energy input parameters (e.g., laser power, scan speed, beam focus) of the AM process at different locations within the component, it is possible to simultaneously: 1. Form a continuous gradient in porosity, which results in a continuous gradient of the effective density; and 2. Control the thermal history and cooling rates during solidification, thereby forming a continuous gradient in the microstructure (e.g., grain size, phase distribution) of the single base material, which in turn results in a continuous gradient in hardness. This AM-based single-material embodiment could thereby achieve the same “center of gravity adjustment” and “wear resistance” goals simultaneously.

Accordingly, an embodiment utilizing a Functionally Graded Material (FGM), such as the Al-SUS gradient composite described herein, is a preferable embodiment due to its dual advantages. Firstly, its continuous density gradient (wherein the density is lower adjacent to the first end to match the covering element and higher adjacent to the second end to match the rotating shaft) achieves the same “center of gravity adjustment” purpose as described in the foregoing embodiments by lowering the overall center of gravity to suppress rotational vibration. Secondly, this density gradient could be selectively combined with a continuous hardness gradient (i.e., lower hardness adjacent to the first end and higher hardness adjacent to the second end) to simultaneously solve the wear problem, thereby providing the second end with the high wear resistance required to match the rotating shaft.

In these embodiments, a vibration change of the top surface and the bottom surface of the covering element 20 is less than a target value, and the target value is 15 μm. Furthermore, in these embodiments, the top surface of the covering element 20 could be optionally coated with a fluorine coating layer 27 (as shown in FIG. 12), wherein the water droplet contact angle of the fluorine coating layer ranges from 100° to 120°, wherein a temperature tolerance of the fluorine coating layer reaches 600 degrees Celsius, wherein the hardness of the fluorine coating layer ranges from 8H to 9H. As an example, a composition of the fluorine coating layer is composed of fluorocarbons accounting for 0.01 to 20 wt %, alkoxysilanes accounting for 5 to 50 wt %, catalytic additives accounting for 0.01 to 20 wt % and solvents accounting for 10 to 90 wt %. Specifically, the fluorocarbons are, for example, fluorine-containing monomers or polymers containing 1 to 20 carbon atoms, for example, selected from a group consisting of per and polyfluoroalkyl substances (PFAS), chlorofluorocarbons (CFCs), hydrofluorocarbons (HFCs), polytetrafluoroethylene (PTFE) or hydrochlorofluorocarbons (HCFCs). In specific applications (such as an ozone water-containing environment), polytetrafluoroethylene (PTFE) or fluorinated ethylene propylene (FEP) may also be added. The alkoxysilanes are selected from, for example, a group consisting of alkoxysilane oligomer, alkoxysilane compound, alkoxysilane polymer, alkylsiloxane oligomer, alkylsiloxane compound, alkylsiloxane polymer, amino-alkyl siloxane oligomer, amino-alkyl siloxane compound or amino-alkyl siloxane polymer. The catalytic additives are, for example, nano-size, and are selected from a group consisting of metals, metal oxides, phosphates and carboxylates of platinum, titanium, tin, zinc, aluminum, silver, calcium, magnesium, potassium, sodium, nickel, chromium, molybdenum, vanadium, copper, iron, cobalt, germanium, hafnium, lanthanum, lead, ruthenium, tantalum, tungsten and zirconium. For example, the catalytic additives are selected from a group consisting of silicon oxides, aluminum oxides, titanium oxides, iron oxides, magnesium oxides, molybdenum oxides, calcium oxides and calcium chlorides. The solvents are, for example, selected from a group consisting of alcohols (such as ethanol, propanol, or butanol), ketones, esters, fluoroalcohols, fluoroethers and ethers.

In these embodiments, the connecting element 30 optionally comprises a hollow cavity 39 (as shown in FIG. 12), and the hollow cavity 39 is partially or entirely filled with a viscoelastic damping material 41 to absorb rotational vibration. For example, the viscoelastic damping material 41 may be selected from (but not limited to) elastomers having a high damping coefficient, such as silicone gel, butyl rubber, or specifically formulated polyurethane elastomers. When selecting these materials, their compatibility in a vacuum environment and low outgassing properties could be further considered to avoid contamination of the process area.

The disclosure also discloses a method of manufacturing a connecting element 30 for a dust-proof and vibration-proof cover of a vacuum pump 100, the connecting element 30 having a first end 31a and a second end 31b. The method comprises the steps of: (a) providing at least one base material; (b) forming the connecting element from the at least one base material while applying a continuous gradient control along a length axis of the connecting element 30, from the first end 31a toward the second end 31b; wherein the continuous gradient control is configured to create the gradient property through either energetic modification or compositional variation. Specifically, this control step comprises applying a continuous gradient of energy treatment (for single base material embodiments) or controlling a continuous gradient in a mixing ratio (for multi-material embodiments); and (c) thereby forming a continuous gradient in at least one physical property of the connecting element 30, the physical property being selected from a group consisting of hardness, rigidity, volume, density, thermal expansion and magnetism.

In one embodiment of the above method, the step (b) comprises applying the energy treatment to the connecting element 30 in a solid state to produce the continuous gradient in hardness by forming a continuous gradient in microstructure, while maintaining a density of the connecting element 30 substantially constant.

Specifically, the step (b) of applying the energy treatment comprises: (i) moving an induction coil along the length axis of the connecting element 30; and (ii) controlling a moving speed or a power output of the induction coil (not shown), wherein the controlling comprises applying a lower power or a faster moving speed adjacent to the first end of the connecting element 30 and progressively increasing the power or progressively decreasing the moving speed toward the second end of the connecting element 30.

In another embodiment, the step (b) of applying the energy treatment comprises applying a laser beam or an electron beam along the length axis of the connecting element 30.

In one embodiment, the continuous gradient in a microstructure formed is defined by: a first microstructure comprising a Pearlite structure or a tempered structure adjacent to the first end of the connecting element; and a second microstructure comprising a Martensite structure adjacent to the second end of the connecting element.

In another embodiment of the method, the step (a) comprises providing the single base material in powdered form, such as powdered aluminum alloy. And wherein the step (b) comprises applying the energy treatment as part of an additive manufacturing process to produce the continuous gradient in density by forming a continuous gradient in porosity, while maintaining a hardness of the single base material substantially constant.

Furthermore, the method further comprises the step of: measuring a vibration change of a top surface and a bottom surface of a covering element 20 associated with the connecting element 30; and adjusting at least one process parameter of the continuous gradient control based on the measured vibration change. Specifically, the process parameter may include, but is not limited to, a position, intensity, power output, moving speed, or duration of the energy treatment (in single material embodiments), or a material feed rate or mixing ratio of the base materials (in multi-material embodiments).

In one application, the connecting element 30 manufactured by this method is a matching element 34 configured to be connected between an extension rod 32 and a rotating shaft 102.

In another application, the connecting element 30 manufactured by this method is an extension rod 32, wherein the first end is configured to connect to a covering element 20 and the second end is configured to connect to a rotating shaft 102.

Note that the specification relating to the above embodiments should be construed as exemplary rather than as limitative of the present disclosure, with many variations and modifications being readily attainable by a person of average skill in the art without departing from the spirit or scope thereof as defined by the appended claims and their legal equivalents.