144086 ⎘
Axial-flow pumps; Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps Turbomolecular vacuum pumps
TURBOMOLECULAR PUMP
#2DUST-PROOF AND VIBRATION-PROOF COVER AND METHOD OF MANUFACTURING CONNECTING ELEMENT THEREFOR
#3VACUUM PUMP WITH AN EDDY CURRENT DAMPER
#4TURBOMOLECULAR VACUUM PUMP AND METHODS FOR MANUFACTURING A ROTOR
#5VACUUM PUMP AND VACUUM EVACUATION SYSTEM
#6TURBOMOLECULAR PUMP
#7ROTOR BLADE FOR A TURBOMOLECULAR VACUUM PUMP
#8VACUUM PUMP
#9THREE-AXIS TUNED MASS DAMPER FOR TURBO MOLECULAR PUMP
#10VACUUM PUMP
#11VACUUM PUMP, ROTATING BODY FOR VACUUM PUMP, AND BALANCE CORRECTING MEMBER FOR VACUUM PUMP
#12VACUUM PUMP
#13TURBOMOLECULAR VACUUM PUMP AND ASSOCIATED METHOD
#14VACUUM PUMP
#15VACUUM PUMP, ROTATING BODY FOR VACUUM PUMP, AND METHOD FOR MANUFACTURING VACUUM PUMP
#16TURBOMOLECULAR PUMP BLADED DISC
#17Vacuum leak detector with multistage vacuum pump and integrated gas-specific gas sensor and method for producing a vacuum leak detector
#18Vacuum pump and adjustment method
#19VACUUM PUMP AND CONTROL DEVICE
#20Vacuum pump
#21VACUUM PUMP, VACUUM PUMP BEARING PROTECTION STRUCTURE, AND VACUUM PUMP ROTATING BODY
#22HERMETIC TERMINAL
#23TURBOMOLECULAR PUMP AND CATHODE ASSEMBLY FOR ETCHING REACTOR
#24VACUUM PUMP AND INSULATION MEMBER FOR USE IN VACUUM PUMP
#25CRYOGENIC PUMP FOR SEMICONDUCTOR PROCESSING
#26VACUUM PUMP, ROTATING BODY, COVER PORTION, AND MANUFACTURING METHOD OF ROTATING BODY
#27Vacuum pump and rotating body thereof
#28SHUT-OFF VALVE, VACUUM PUMP SYSTEM, AND VACUUM PUMP
#29PUMP MONITORING SYSTEM AND METHOD
#30VACUUM PUMP
#31TURBOMOLECULAR PUMP
#32VACUUM PUMP, VACUUM PUMP CONTROLLER, AND REMOTE CONTROLLER
#33CELL SEPARATION USING MICROCHANNEL HAVING PATTERNED POSTS
#34VACUUM PUMP AND VACUUM EXHAUST APPARATUS
#35ROTOR ASSEMBLY FOR A TURBOMOLECULAR PUMP
#36VACUUM PUMP AND ROTATING BODY FOR VACUUM PUMP
#37Bench-top time of flight mass spectrometer
#38Vacuum pump and control device
#39VACUUM PUMP
#40Vacuum pump and rotating cylinder provided in vacuum pump
#41Heating device and vacuum pump
#42VACUUM PUMP
#43VACUUM PUMP
#44Vacuum pump system and control method
#45Oil feed nut and oil reservoir for a vacuum pump
#46HARMONIC ELIMINATION CIRCUIT, POSITION DETECTION DEVICE, MAGNETIC BEARING DEVICE AND VACUUM PUMP
#47Vacuum pump and magnetic bearing
#48VACUUM PUMP COMPRISING AN AXIAL MAGNETIC BEARING AND A RADIAL GAS FOIL BEARING
#49Vacuum pump and water cooling spacer
#50CLEANING APPARATUS FOR VACUUM EXHAUST SYSTEM
#51Vacuum pump and vacuum pump rotor blade
#52Vacuum pump and rotating body for vacuum pump
#53VACUUM PUMP AND VACUUM PUMP CLEANING SYSTEM
#54Vacuum pump
#55METHOD OF SETTING UP AN ELECTRICAL MOTOR SPEED CONTROL IN A FLUIDIC SYSTEM
#56Vacuum pump and controller
#57Mounting a flanged vacuum pump to a vacuum system
#58VACUUM PUMP
#59Vacuum pump
#60VACUUM PUMP, DETOXIFYING DEVICE, AND EXHAUST GAS PROCESSING SYSTEM
#61Vacuum pump and vacuum pump component part
#62Vacuum pump and stator column
#63ROTATING DEVICE AND VACUUM PUMP
#64VACUUM PUMP, VACUUM PUMP SET FOR EVACUATING A SEMICONDUCTOR PROCESSING CHAMBER AND METHOD OF EVACUATING A SEMICONDUCTOR PROCESSING CHAMBER
#65Vacuum pump
#66Vacuum pump
#67Vacuum pump
#68Vacuum pump and leak detector
#69Vacuum chamber module
#70Vacuum pump and vacuum pump system
#71VACUUM PUMP AND ACCESSORY UNIT OF VACUUM PUMP
#72TURBOMOLECULAR VACUUM PUMP
#73Vacuum pump including a cover, covering the base with an air insulating layer
#74Vacuum pump
#75Vacuum pump, rotor, and washer
#76Vacuum pump, rotor, and rotor body with rupture location control means on the rotor
#77Vacuum thread-groove pump with thread exhaust channels
#78Vacuum pump and vacuum pump component
#79VACUUM ASSEMBLY AND VACUUM PUMP WITH AN AXIAL THROUGH PASSAGE
#80Vacuum pump
#81Vacuum pump
#82Estimation device, vacuum valve, and vacuum pump
#83VARIABLE INLET CONDUCTANCE VACUUM PUMP, VACUUM PUMP ARRANGEMENT AND METHOD
#84Rotor support and vacuum pump with such a rotor support
#85VACUUM PUMP AND PROTECTION MEMBER PROVIDED IN VACUUM PUMP
#86Vacuum pump and stator component of thread groove pump portion of the vacuum pump
#87Vacuum pump and linked-type thread groove spacer
#88PUMP MONITORING DEVICE, VACUUM PUMP, AND PRODUCT-ACCUMULATION DIAGNOSIS DATA PROCESSING PROGRAM
#89Lubricant supply system and vacuum pump
#90Methods and systems for cooling a vacuum pump
#91Vacuum pump including magnetic bearing and motor bearing operable as radial magnetic bearing, motor, and thrust magnetic bearing
#92Analysis device of vacuum pump, vacuum pump, storage medium recording analysis program, and analysis method
#93Turbomolecular pump and cathode assembly for etching reactor
#94Control apparatus and vacuum pump provided with said control apparatus
#95VACUUM PUMP AND CONTROL APPARATUS OF VACUUM PUMP
#96Vacuum pump
#97Vacuum pump
#98Turbo-molecular pump
#99A TURBOMOLECULAR PUMP, A VACUUM PUMPING SYSTEM AND A METHOD OF EVACUATING A VACUUM CHAMBER
#100VACUUM PUMP
#101Vacuum pump and control device for vacuum pump
#102Vacuum pump including levitated magnetic bearing
#103Multi-stage turbomolecular pump
#104Vacuum component and evacuation method using the same
#105ENRICHMENT AND PURIFICATION DEVICE FOR SINGLE GAS IN MIXED GAS
#106Multiple chamber vacuum exhaust system
#107Vacuum pump and vacuum pump component
#108Turbo-molecular pump, rotor and stator
#109Oil feed assembly for a vacuum pump having a venting conduit
#110Turbomolecular pump lubricant supply systems
#111TURBO-MOLECULAR PUMP AND STATOR
#112Vacuum pump, cylindrical portion used in vacuum pump, and base portion
#113Bearing cage
#114Vacuum pump, stator column, base, and exhaust system of vacuum pump
#115System for evacuating a chamber
#116Bench-top time of flight mass spectrometer
#117Vacuum pump and temperature control device
#118Vacuum pump, and control device of vacuum pump
#119Vacuum pump
#120Vacuum pumping device and vacuum pumping device starting method
#121Vacuum pump and vacuum-pump damper
#122VACUUM PUMP SYSTEM
#123Reinforced vacuum system component
#124Vacuum pump, and control device of vacuum pump
#125Vacuum pump, and control device of vacuum pump
#126PRELOAD FORCE TOOL
#127Vacuum pump, temperature adjustment controller used for vacuum pump, inspection tool, and method of diagnosing temperature-adjustment function unit
#128Vacuum pump and magnetic bearing controller with multiple rigidity modes at high and low gains
#129Vacuum system with a multi-stage and multi-inlet vacuum pump with a directional element separating pump stages
#130Vacuum pump exhaust system, vacuum pump provided for vacuum pump exhaust system, purge gas supply unit, temperature sensor unit, and exhausting method of vacuum pump
#131Vacuum pump
#132Vacuum pump
#133Vacuum pump and leak detector
#134VACUUM PUMPING ARRANGEMENT
#135TURBOMOLECULAR PUMP AND METHOD AND APPARATUS FOR CONTROLLING THE PRESSURE IN A PROCESS CHAMBER
#136Vacuum pump, rotor, rotor fin, and casing
#137Power supply integrated vacuum pump
#138Vacuum pump system
#139Leak detector for checking sealing tightness of an object comprising a pumping device including a turbomolecular pump and first and second vacuum pumps having at least one first and second pumping stage wherein the outlet of the second vacuum pump is connected between pumping stages of the first vacuum pump
#140Vacuum pump
#141Vacuum pump, and blade component, rotor, and stationary blade used therein
#142Bearing cage retainer
#143Turbo-molecular pump blade design
#144CONTROLLER AND VACUUM PUMP DEVICE
#145Vacuum pump and motor controller
#146Leak detector and leak detection method for leak-testing objects
#147VACUUM PUMP, AND MAGNETIC BEARING PORTION AND SHAFT PROVIDED IN VACUUM PUMP
#148Apparatus and method for evacuating very large volumes
#149POWER SUPPLY SYSTEM FOR A VACUUM PUMP AND VACUUM PUMP
#150Flywheel with bifurcated molecular pump
#151PUMP MONITORING DEVICE, VACUUM PROCESSING DEVICE, AND VACUUM PUMP
#152Vacuum pump with a rotary body in a case with the rotary body having at least three balance correction portions accessible from an outside of the case for balance correction by an n-plane method
#153System for evacuating a chamber
#154Vacuum pump and heating device therefor
#155Turbo molecular pump for mass spectrometer
#156STATOR BLADE UNIT FOR A TURBOMOLECULAR PUMP
#157Vacuum pump, rotating portion included in vacuum pump, and imbalance correction method
#158Variable inlet conductance vacuum pump, vacuum pump arrangement and method
#159VACUUM PUMP
#160Bearing support for a vacuum pump
#161Vacuum pump and diagnosis system
#162Multiple port vacuum pump system
#163Pump bearing holders
#164A MULTIPLE STAGE TURBOMOLECULAR PUMP WITH INTER-STAGE INLET
#165Vacuum pump and control apparatus associated with vacuum pump
#166VACUUM DEVICE AND METHOD FOR COATING COMPONENTS OF A VACUUM DEVICE
#167Vibration damping connector systems
#168Turbomolecular pump deposition control and particle management
#169Vacuum connection mechanism and electron optical device
#170Magnetic levitation control device and vacuum pump
#171Vacuum pump, and waterproof structure and control apparatus applied to vacuum pump
#172Vacuum pump with control device in relation to outer cylinder
#173Turbomolecular pump lubricant supply systems
#174Vacuum pump and rotating cylindrical body included in vacuum pump
#175Turbo pump vent assembly and method
#176Vacuum pump
#177Mass-spectrometric leak detector with turbomolecular pump and booster pump on a common shaft
#178Stator component of vacuum pump
#179Turbomolecular vacuum pump for ionized matter and plasma fields
#180Vacuum pump with heat generation element in relation to housing
#181Integrated connector between first and second vacuum pumps creating a vapor phase region environment
#182Turbo-molecular pump
#183Vacuum pump
#184Electromagnetic unit, magnetic bearing device, and vacuum pump
#185Connection device
#186Vacuum pump
#187Vacuum pump, and rotor blade and reflection mechanism mounted in vacuum pump
#188Connected thread groove spacer and vacuum pump
#189Device for storing kinetic energy
#190Dry vacuum pump with pressurized bearing and seal
#191Vacuum pumping device, vacuum pump, and vacuum valve
#192Vacuum pump
#193LUBRICATION OF GEARS IN TWIN-SHAFT PUMPS
#194Power source integrated vacuum pump having a power source with a substrate in contact with and covering a portion of a cooling surface which is also covered by a heat insulating plate
#195Vacuum pump
#196Vacuum pump
#197Vacuum pump and pump-integrated power source device
#198Center ring and vacuum pump
#199Power source-integrated vacuum pump
#200Direct drive type dual turbo blower cooling structure
#201Turbo-molecular pump
#202Magnetic bearing control device and vacuum pump
#203PUMP SYSTEM
#204VACUUM PUMP
#205ROTOR AND VACUUM PUMP EQUIPPED WITH SAME
#206Vacuum-pump rotor
#207Deposition substance monitoring device and vacuum pump
#208Adaptor and vacuum pump
#209Pump lubricant supply systems
#210Vacuum pump lubricant supply systems
#211Vacuum pump
#212Vacuum pump
#213Monitoring device and vacuum pump
#214Heating device and turbo molecular pump
#215Vacuum pump control device and vacuum pump
#216Temperature control device and turbo-molecular pump
#217Vacuum pump and abnormality cause estimating method for vacuum pump
#218Vacuum pump
#219Monitoring device
#220Outlet port part and vacuum pump
#221Vacuum pump and mass spectrometer
#222Turbine cap for turbo-molecular pump
#223Rotor disc and rotor for a vacuum pump
#224Vacuum pump and heat insulating spacer used in vacuum pump
#225Vacuum exhaust mechanism, compound type vacuum pump, and rotating body part
#226PROTECTIVE BEARING, BEARING UNIT, AND VACUUM PUMP
#227Vacuum pump
#228Vacuum pump component, siegbahn type exhaust mechanism and compound vacuum pump
#229Magnetic bearing device and vacuum pump
#230ROTOR DEVICE FOR A VACUUM PUMP, AND VACUUM PUMP
#231Vacuum pump
#232Magnetic bearing device, and vacuum pump having same
#233Stator component of vacuum pump
#234Thread groove pump mechanism, vacuum pump including thread groove pump mechanism, and rotor, outer circumference side stator, and inner circumference side stator used in thread groove pump mechanism
#235Vacuum pump
#236Vacuum system securing devices
#237Vacuum system
#238Vacuum pump
#239Vacuum pump
#240Vacuum pump
#241Turbo-molecular pump
#242Vacuum pump
#243MASS SEPARATION VIA A TURBOMOLECULAR PUMP
#244Vacuum pump with back-up bearing contact sensor
#245Vacuum pump
#246Vacuum pump
#247Rotor and vacuum pump equipped with same
#248Stator-side member and vacuum pump
#249Turbo-molecular pump
#250Turbo-molecular pump
#251Vacuum pump protection net, method for manufacturing the same, and vacuum pump
#252Vacuum pump
#253Molecular pump
#254Vacuum pump
#255Vacuum pump
#256Vacuum pump
#257Deposit detection device for exhaust pump and exhaust pump
#258IPM motor for vacuum pump
#259Turbo-molecular pump
#260Arrangement with a vacuum pump and method of compensating magnetic field produced by magnetic interference field of at least one vacuum pump component
#261VACUUM PUMP AND ARRANGEMENT WITH VACUUM PUMP
#262Motor controller and turbo-molecular pump
#263Turbo-molecular pump
#264Semiconductor process pumping arrangements
#265Multiple port vacuum pump system
#266Magnetic bearing device and vacuum pump
#267Gas transfer vacuum pump
#268Vacuum pump
#269Sensorless magnetic levitation vacuum pump and sensorless magnetic levitation device
#270Vacuum pump
#271TURBOMOLECULAR PUMP
#272Vacuum pump
#273Method of dynamic balancing for magnetic levitation molecular pump
#274VACUUM PUMP
#275Method and system for synchronously inhibiting subcritical vibrations of magnetic levitation molecular pump rotor
#276Adapter for vacuum pumps and associated pumping device
#277Method of dynamic balancing for magnetic levitation molecular pump
#278Vacuum pump connecting apparatus and method for installing vacuum pump connecting apparatus
#279Vacuum pump
#280Turbine cap for turbo-molecular pump
#281Vacuum pump
#282Pump testing for predicting lifetime and wear conditions
#283VACUUM PUMP
#284Stator member and vacuum pump
#285Vacuum pump
#286Magnetic bearing device and vacuum pump
#287Magnetic bearing device and vacuum pump
#288Motor driving device and vacuum pump
#289Rotary vacuum pump
#290Vacuum pump
#291Vibration damper for vacuum pumps
#292Turbine cap for turbo-molecular pump
#293Evacuating a chamber
#294Apparatus and method for shielding a controlled pressure environment
#295Turbo-molecular pump
#296Vacuum pump having fastening element for securing rotor part to rotor shaft and deformed safety element projecting in axial direction for preventing relative rotation between the rotor part and rotor shaft
#297Vacuum pump
#298Fixed blade assembly usable in exhaust pump, and exhaust pump provided with same
#299Vacuum pumping system
#300Bolt-fastening system for turbomolecular pump, and a pump containing the same