Santa Clara, California
United States
101
2024-08-01
84
2026-02-03
These are the the leading inventors for applications assigned to INTEVAC, INC.:
INTEVAC, INC. based in Santa Clara, US has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
CYLINDRICAL CATHODE AND CHAMBER USING SAME FOR SPUTTERING
#2 | 2022-12-22 ✅ Patent 12,283,470 granted on 2025-04-22Multifocal magnetron design for physical vapor deposition processing on a single cathode
#3 | 2022-06-16 ✅ Patent 11,897,811 granted on 2024-02-13System for forming nano-laminate optical coating
#4 | 2021-11-18 ✅ Patent 12,077,851 granted on 2024-09-03Creation of distributed voids in thin films
#5 | 2021-03-25 ✅ Patent 11,414,748 granted on 2022-08-16System with dual-motion substrate carriers
#6 | 2020-06-18 ✅ Patent 11,694,913 granted on 2023-07-04Hybrid system architecture for thin film deposition
#7 | 2019-12-19 ✅ Patent 11,187,834 granted on 2021-11-30Multi-colored dielectric coating
#8 | 2019-03-14 ✅ Patent 10,692,683 granted on 2020-06-23Thermally assisted negative electron affinity photocathode
#9 | 2019-01-24 ✅ Patent 10,559,710 granted on 2020-02-11System of height and alignment rollers for precise alignment of wafers for ion implantation
#10 | 2019-01-24 ✅ Patent 10,854,772 granted on 2020-12-01Multi-piece substrate holder and alignment mechanism
#11 | 2019-01-24 ✅ Patent 11,236,013 granted on 2022-02-01System for forming nano-laminate optical coating
#12 | 2019-01-17 ✅ Patent 10,425,589 granted on 2019-09-24Adaptive XDR via reset and mean signal values
#13 | 2018-12-06 ✅ Patent 10,955,589 granted on 2021-03-23Optical coating having nano-laminate for improved durability
#14 | 2018-06-21 ✅ Patent 10,752,987 granted on 2020-08-25System architecture for combined static and pass-by processing
#15 | 2018-03-01 ✅ Patent 10,418,260 granted on 2019-09-17In line fan out system
#16 | 2018-02-01 ✅ Patent 10,197,802 granted on 2019-02-05Biocular compact collimation apparatus
#17 | 2018-01-25 ✅ Patent 11,255,013 granted on 2022-02-22Ion implantation for modification of thin film coatings on glass
#18 | 2017-11-30 ✅ Patent 10,636,935 granted on 2020-04-28Ion implant system having grid assembly
#19 | 2017-08-17 ✅ Patent 10,446,430 granted on 2019-10-15Patterned chuck for substrate processing
#20 | 2017-06-01 ✅ Patent 9,896,758 granted on 2018-02-20Method to produce highly transparent hydrogenated carbon protective coating for transparent substrates
#21 | 2017-03-02 ✅ Patent 10,679,883 granted on 2020-06-09Wafer plate and mask arrangement for substrate fabrication
#22 | 2017-01-26 ✅ Patent 10,115,617 granted on 2018-10-30System architecture for vacuum processing
#23 | 2017-01-19 ✅ Patent 9,734,977 granted on 2017-08-15Image intensifier with indexed compliant anode assembly
#24 | 2017-01-12 ✅ Patent 9,850,570 granted on 2017-12-26Ion implantation for modification of thin film coatings on glass
#25 | 2016-08-11 ✅ Patent 9,875,922 granted on 2018-01-23Substrate processing system and method
#26 | 2016-07-14 ✅ Patent 9,583,661 granted on 2017-02-28Grid for plasma ion implant
#27 | 2016-06-23 ✅ Patent 9,741,894 granted on 2017-08-22Ion implant system having grid assembly
#28 | 2016-05-12SPUTTERING SYSTEM AND METHOD FOR HIGHLY MAGNETIC MATERIALS
#29 | 2016-02-11 ✅ Patent 9,543,114 granted on 2017-01-10Implant masking and alignment system with rollers
#30 | 2015-08-20SPUTTERING SYSTEM AND METHOD FOR HIGHLY MAGNETIC MATERIALS
#31 | 2015-06-18 ✅ Patent 10,062,600 granted on 2018-08-28System and method for bi-facial processing of substrates
#32 | 2015-03-12 ✅ Patent 9,303,314 granted on 2016-04-05Ion implant system having grid assembly
#33 | 2014-12-25 ✅ Patent 9,633,880 granted on 2017-04-25Elevator linear motor drive
#34 | 2014-11-13SPUTTERING SYSTEM AND METHOD USING COUNTERWEIGHT
#35 | 2014-10-23 ✅ Patent 10,106,883 granted on 2018-10-23Sputtering system and method using direction-dependent scan speed or power
#36 | 2014-06-19 ✅ Patent 9,318,332 granted on 2016-04-19Grid for plasma ion implant
#37 | 2014-06-19SOLAR CELLS HAVING GRADED DOPED REGIONS AND METHODS OF MAKING SOLAR CELLS HAVING GRADED DOPED REGIONS
#38 | 2014-04-17METHOD AND APPARATUS TO PRODUCE HIGH DENSITY OVERCOATS
#39 | 2014-01-09 ✅ Patent 9,605,340 granted on 2017-03-28Method to produce highly transparent hydrogenated carbon protective coating for transparent substrates
#40 | 2013-10-31 ✅ Patent 9,502,276 granted on 2016-11-22System architecture for vacuum processing
#41 | 2013-10-31 ✅ Patent 9,892,890 granted on 2018-02-13Narrow source for physical vapor deposition processing
#42 | 2013-10-24 ✅ Patent 9,525,099 granted on 2016-12-20Dual-mask arrangement for solar cell fabrication
#43 | 2013-06-27 ✅ Patent 9,914,994 granted on 2018-03-13System architecture for combined static and pass-by processing
#44 | 2013-06-13 ✅ Patent 8,998,553 granted on 2015-04-07High throughput load lock for solar wafers
#45 | 2013-05-09 ✅ Patent 9,324,598 granted on 2016-04-26Substrate processing system and method
#46 | 2013-05-09LINEAR SCANNING SPUTTERING SYSTEM AND METHOD
#47 | 2013-05-02SYSTEM ARCHITECTURE FOR PLASMA PROCESSING SOLAR WAFERS
#48 | 2013-05-02 ✅ Patent 8,975,668 granted on 2015-03-10Backside-thinned image sensor using AlOsurface passivation
#49 | 2013-05-02SOLAR WAFER ELECTROSTATIC CHUCK
#50 | 2013-04-25SYSTEM AND METHOD FOR COMMERCIAL FABRICATION OF PATTERNED MEDIA
#51 | 2013-04-11 ✅ Patent 9,034,143 granted on 2015-05-19Inductive/capacitive hybrid plasma source and system with such chamber
#52 | 2012-07-05 ✅ Patent 8,677,929 granted on 2014-03-25Method and apparatus for masking solar cell substrates for deposition
#53 | 2012-06-07DRY ETCHING METHOD OF SURFACE TEXTURE FORMATION ON SILICON WAFER
#54 | 2012-05-24 ✅ Patent 8,697,552 granted on 2014-04-15Method for ion implant using grid assembly
#55 | 2012-05-24 ✅ Patent 8,997,688 granted on 2015-04-07Ion implant system having grid assembly
#56 | 2012-04-19 ✅ Patent 8,354,001 granted on 2013-01-15Processing thin wafers
#57 | 2012-04-19SYSTEM AND METHOD FOR COMMERCIAL FABRICATION OF PATTERNED MEDIA
#58 | 2012-02-23 ✅ Patent 8,373,856 granted on 2013-02-12Optical beam spectrometer with movable lens
#59 | 2011-10-27 ✅ Patent 8,698,925 granted on 2014-04-15Collimator bonding structure and method
#60 | 2011-08-25 ✅ Patent 8,114,339 granted on 2012-02-14Method of and apparatus utilizing carbon cord for evaporation of metals
#61 | 2011-08-11ADJUSTABLE SHADOW MASK ASSEMBLY FOR USE IN SOLAR CELL FABRICATIONS
#62 | 2011-06-30 ✅ Patent 8,303,764 granted on 2012-11-06Apparatus and methods for transporting and processing substrates
#63 | 2011-05-05 ✅ Patent 8,087,380 granted on 2012-01-03Evaporative system for solar cell fabrication
#64 | 2011-03-03 ✅ Patent 8,421,012 granted on 2013-04-16Low energy portable low-light camera with wavelength cutoff
#65 | 2010-12-30ELECTROSTATIC CHUCK
#66 | 2010-12-23 ✅ Patent 8,749,053 granted on 2014-06-10Plasma grid implant system for use in solar cell fabrications
#67 | 2010-09-23 ✅ Patent 8,715,515 granted on 2014-05-06Process for optimization of island to trench ratio in patterned media
#68 | 2010-08-19 ✅ Patent 8,363,378 granted on 2013-01-29Method for optimized removal of wafer from electrostatic chuck
#69 | 2010-04-22 ✅ Patent 8,697,189 granted on 2014-04-15Method and apparatus for precision surface modification in nano-imprint lithography
#70 | 2010-02-04 ✅ Patent 9,157,145 granted on 2015-10-13Processing tool with combined sputter and evaporation deposition sources
#71 | 2010-01-07 ✅ Patent 8,795,466 granted on 2014-08-05System and method for processing substrates with detachable mask
#72 | 2009-12-31 ✅ Patent 8,992,153 granted on 2015-03-31System and method for substrate transport
#73 | 2009-12-17 ✅ Patent 8,871,619 granted on 2014-10-28Application specific implant system and method for use in solar cell fabrications
#74 | 2009-12-17 ✅ Patent 8,697,553 granted on 2014-04-15Solar cell fabrication with faceting and ion implantation
#75 | 2009-11-12 ✅ Patent 8,382,965 granted on 2013-02-26Tools and methods for mounting transport rails in a substrate processing system
#76 | 2009-10-08 ✅ Patent 8,206,551 granted on 2012-06-26Processing thin wafers
#77 | 2009-07-30 ✅ Patent 9,524,896 granted on 2016-12-20Apparatus and methods for transporting and processing substrates
#78 | 2009-06-11 ✅ Patent 8,784,622 granted on 2014-07-22System and method for dual-sided sputter etch of substrates
#79 | 2009-06-11 ✅ Patent 8,349,196 granted on 2013-01-08System and method for commercial fabrication of patterned media
#80 | 2009-06-11 ✅ Patent 9,165,587 granted on 2015-10-20System and method for dual-sided sputter etch of substrates
#81 | 2009-05-28 ✅ Patent 8,125,637 granted on 2012-02-28Optical beam spectrometer with movable lens
#82 | 2009-05-14 ✅ Patent 8,834,088 granted on 2014-09-16Elevator linear motor drive
#83 | 2009-04-02ELECTROSTATIC CHUCK APPARATUS
#84 | 2009-04-02ELECTROSTATIC CHUCK APPARATUS
#85 | 2009-03-26 ✅ Patent 8,293,066 granted on 2012-10-23Apparatus and methods for transporting and processing substrates
#86 | 2009-01-01HYBRID ETCH CHAMBER WITH DECOUPLED PLASMA CONTROLS
#87 | 2008-08-14MAGNETICALLY COUPLED VALVE ACTUATOR
#88 | 2008-03-20 ✅ Patent 7,901,539 granted on 2011-03-08Apparatus and methods for transporting and processing substrates
#89 | 2007-02-15 ✅ Patent 7,531,826 granted on 2009-05-12Photocathode structure and operation
#90 | 2006-06-29 ✅ Patent 7,479,686 granted on 2009-01-20Backside imaging through a doped layer
#91 | 2006-06-01 ✅ Patent 7,608,533 granted on 2009-10-27Semiconductor die attachment for high vacuum tubes
#92 | 2006-05-18 ✅ Patent 7,611,322 granted on 2009-11-03Processing thin wafers
#93 | 2006-05-09 ✅ Patent 7,042,060 granted on 2006-05-09Backside thinning of image array devices
#94 | 2006-02-28 ✅ Patent 7,005,637 granted on 2006-02-28Backside thinning of image array devices
#95 | 2005-11-29 ✅ Patent 6,969,839 granted on 2005-11-29Backthinned CMOS sensor with low fixed pattern noise
#96 | 2005-11-24 ✅ Patent 7,607,560 granted on 2009-10-27Semiconductor die attachment for high vacuum tubes
#97 | 2005-11-17 ✅ Patent 7,012,328 granted on 2006-03-14Semiconductor die attachment for high vacuum tubes
#98 | 2005-11-17 ✅ Patent 7,000,418 granted on 2006-02-21Capacitance sensing for substrate cooling
#99 | 2005-07-28 ✅ Patent 6,943,425 granted on 2005-09-13Wavelength extension for backthinned silicon image arrays
#100 | 2005-07-19 ✅ Patent 6,919,001 granted on 2005-07-19Disk coating system
Also check out Intevac, Inc.'s (Santa Clara, United States) applicant profile with 49 patent applications submitted.
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