Assignee profile:

INTEVAC, INC.

City:

Santa Clara, California

Country:

United States

Published Applications:

101

Last publication date:

2024-08-01

Patent Grants:

84

Last grant date:

2026-02-03

Top Inventors for applications by INTEVAC, INC.

These are the the leading inventors for applications assigned to INTEVAC, INC.:

Recent patent applications by INTEVAC, INC.

INTEVAC, INC. based in Santa Clara, US has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:

#1 | 2024-08-01 ✅ Patent 12,542,263 granted on 2026-02-03
US20240258087A1
Electricity

CYLINDRICAL CATHODE AND CHAMBER USING SAME FOR SPUTTERING

#2 | 2022-12-22 ✅ Patent 12,283,470 granted on 2025-04-22
US20220406582A1
Electricity

Multifocal magnetron design for physical vapor deposition processing on a single cathode

#3 | 2022-06-16 ✅ Patent 11,897,811 granted on 2024-02-13
US20220185726A1
Chemistry; metallurgy

System for forming nano-laminate optical coating

#4 | 2021-11-18 ✅ Patent 12,077,851 granted on 2024-09-03
US20210355579A1
Chemistry; metallurgy

Creation of distributed voids in thin films

#5 | 2021-03-25 ✅ Patent 11,414,748 granted on 2022-08-16
US20210087674A1
Chemistry; metallurgy

System with dual-motion substrate carriers

#6 | 2020-06-18 ✅ Patent 11,694,913 granted on 2023-07-04
US20200194289A1
Electricity

Hybrid system architecture for thin film deposition

#7 | 2019-12-19 ✅ Patent 11,187,834 granted on 2021-11-30
US20190383976A1
Physics

Multi-colored dielectric coating

#8 | 2019-03-14 ✅ Patent 10,692,683 granted on 2020-06-23
US20190080875A1
Electricity

Thermally assisted negative electron affinity photocathode

#9 | 2019-01-24 ✅ Patent 10,559,710 granted on 2020-02-11
US20190027636A1
Electricity

System of height and alignment rollers for precise alignment of wafers for ion implantation

#10 | 2019-01-24 ✅ Patent 10,854,772 granted on 2020-12-01
US20190027635A1
Electricity

Multi-piece substrate holder and alignment mechanism

#11 | 2019-01-24 ✅ Patent 11,236,013 granted on 2022-02-01
US20190025469A1
Physics

System for forming nano-laminate optical coating

#12 | 2019-01-17 ✅ Patent 10,425,589 granted on 2019-09-24
US20190020805A1
Electricity

Adaptive XDR via reset and mean signal values

#13 | 2018-12-06 ✅ Patent 10,955,589 granted on 2021-03-23
US20180348409A1
Physics

Optical coating having nano-laminate for improved durability

#14 | 2018-06-21 ✅ Patent 10,752,987 granted on 2020-08-25
US20180171463A1
Chemistry; metallurgy

System architecture for combined static and pass-by processing

#15 | 2018-03-01 ✅ Patent 10,418,260 granted on 2019-09-17
US20180061689A1
Electricity

In line fan out system

#16 | 2018-02-01 ✅ Patent 10,197,802 granted on 2019-02-05
US20180031835A1
Physics

Biocular compact collimation apparatus

#17 | 2018-01-25 ✅ Patent 11,255,013 granted on 2022-02-22
US20180023190A1
Chemistry; metallurgy

Ion implantation for modification of thin film coatings on glass

#18 | 2017-11-30 ✅ Patent 10,636,935 granted on 2020-04-28
US20170345964A1
Electricity

Ion implant system having grid assembly

#19 | 2017-08-17 ✅ Patent 10,446,430 granted on 2019-10-15
US20170236740A1
Electricity

Patterned chuck for substrate processing

#20 | 2017-06-01 ✅ Patent 9,896,758 granted on 2018-02-20
US20170152592A1
Chemistry; metallurgy

Method to produce highly transparent hydrogenated carbon protective coating for transparent substrates

#21 | 2017-03-02 ✅ Patent 10,679,883 granted on 2020-06-09
US20170062258A1
Electricity

Wafer plate and mask arrangement for substrate fabrication

#22 | 2017-01-26 ✅ Patent 10,115,617 granted on 2018-10-30
US20170025300A1
Electricity

System architecture for vacuum processing

#23 | 2017-01-19 ✅ Patent 9,734,977 granted on 2017-08-15
US20170018391A1
Electricity

Image intensifier with indexed compliant anode assembly

#24 | 2017-01-12 ✅ Patent 9,850,570 granted on 2017-12-26
US20170009337A1
Chemistry; metallurgy

Ion implantation for modification of thin film coatings on glass

#25 | 2016-08-11 ✅ Patent 9,875,922 granted on 2018-01-23
US20160233122A1
Electricity

Substrate processing system and method

#26 | 2016-07-14 ✅ Patent 9,583,661 granted on 2017-02-28
US20160204295A1
Electricity

Grid for plasma ion implant

#27 | 2016-06-23 ✅ Patent 9,741,894 granted on 2017-08-22
US20160181465A1
Electricity

Ion implant system having grid assembly

#28 | 2016-05-12
US20160133445A9
Electricity

SPUTTERING SYSTEM AND METHOD FOR HIGHLY MAGNETIC MATERIALS

#29 | 2016-02-11 ✅ Patent 9,543,114 granted on 2017-01-10
US20160042913A1
Electricity

Implant masking and alignment system with rollers

#30 | 2015-08-20
US20150235824A1
Electricity

SPUTTERING SYSTEM AND METHOD FOR HIGHLY MAGNETIC MATERIALS

#31 | 2015-06-18 ✅ Patent 10,062,600 granted on 2018-08-28
US20150170947A1
Electricity

System and method for bi-facial processing of substrates

#32 | 2015-03-12 ✅ Patent 9,303,314 granted on 2016-04-05
US20150072461A1
Electricity

Ion implant system having grid assembly

#33 | 2014-12-25 ✅ Patent 9,633,880 granted on 2017-04-25
US20140377040A1
Electricity

Elevator linear motor drive

#34 | 2014-11-13
US20140332376A1
Electricity

SPUTTERING SYSTEM AND METHOD USING COUNTERWEIGHT

#35 | 2014-10-23 ✅ Patent 10,106,883 granted on 2018-10-23
US20140311893A1
Chemistry; metallurgy

Sputtering system and method using direction-dependent scan speed or power

#36 | 2014-06-19 ✅ Patent 9,318,332 granted on 2016-04-19
US20140170795A1
Electricity

Grid for plasma ion implant

#37 | 2014-06-19
US20140166087A1
Electricity

SOLAR CELLS HAVING GRADED DOPED REGIONS AND METHODS OF MAKING SOLAR CELLS HAVING GRADED DOPED REGIONS

#38 | 2014-04-17
US20140102888A1
Chemistry; metallurgy

METHOD AND APPARATUS TO PRODUCE HIGH DENSITY OVERCOATS

#39 | 2014-01-09 ✅ Patent 9,605,340 granted on 2017-03-28
US20140008214A1
Chemistry; metallurgy

Method to produce highly transparent hydrogenated carbon protective coating for transparent substrates

#40 | 2013-10-31 ✅ Patent 9,502,276 granted on 2016-11-22
US20130287526A1
Electricity

System architecture for vacuum processing

#41 | 2013-10-31 ✅ Patent 9,892,890 granted on 2018-02-13
US20130284594A1
Chemistry; metallurgy

Narrow source for physical vapor deposition processing

#42 | 2013-10-24 ✅ Patent 9,525,099 granted on 2016-12-20
US20130276978A1
Electricity

Dual-mask arrangement for solar cell fabrication

#43 | 2013-06-27 ✅ Patent 9,914,994 granted on 2018-03-13
US20130161183A1
Chemistry; metallurgy

System architecture for combined static and pass-by processing

#44 | 2013-06-13 ✅ Patent 8,998,553 granted on 2015-04-07
US20130149075A1
Electricity

High throughput load lock for solar wafers

#45 | 2013-05-09 ✅ Patent 9,324,598 granted on 2016-04-26
US20130115764A1
Electricity

Substrate processing system and method

#46 | 2013-05-09
US20130112546A1
Electricity

LINEAR SCANNING SPUTTERING SYSTEM AND METHOD

#47 | 2013-05-02
US20130109189A1
Electricity

SYSTEM ARCHITECTURE FOR PLASMA PROCESSING SOLAR WAFERS

#48 | 2013-05-02 ✅ Patent 8,975,668 granted on 2015-03-10
US20130105928A1
Electricity

Backside-thinned image sensor using AlOsurface passivation

#49 | 2013-05-02
US20130105087A1
Electricity

SOLAR WAFER ELECTROSTATIC CHUCK

#50 | 2013-04-25
US20130098761A1
Physics

SYSTEM AND METHOD FOR COMMERCIAL FABRICATION OF PATTERNED MEDIA

#51 | 2013-04-11 ✅ Patent 9,034,143 granted on 2015-05-19
US20130087531A1
Electricity

Inductive/capacitive hybrid plasma source and system with such chamber

#52 | 2012-07-05 ✅ Patent 8,677,929 granted on 2014-03-25
US20120171807A1
Electricity

Method and apparatus for masking solar cell substrates for deposition

#53 | 2012-06-07
US20120138139A1
Electricity

DRY ETCHING METHOD OF SURFACE TEXTURE FORMATION ON SILICON WAFER

#54 | 2012-05-24 ✅ Patent 8,697,552 granted on 2014-04-15
US20120129325A1
Electricity

Method for ion implant using grid assembly

#55 | 2012-05-24 ✅ Patent 8,997,688 granted on 2015-04-07
US20120125259A1
Electricity

Ion implant system having grid assembly

#56 | 2012-04-19 ✅ Patent 8,354,001 granted on 2013-01-15
US20120093616A1
Electricity

Processing thin wafers

#57 | 2012-04-19
US20120090992A1
Physics

SYSTEM AND METHOD FOR COMMERCIAL FABRICATION OF PATTERNED MEDIA

#58 | 2012-02-23 ✅ Patent 8,373,856 granted on 2013-02-12
US20120044487A1
Physics

Optical beam spectrometer with movable lens

#59 | 2011-10-27 ✅ Patent 8,698,925 granted on 2014-04-15
US20110261239A1
Performing operations; transporting

Collimator bonding structure and method

#60 | 2011-08-25 ✅ Patent 8,114,339 granted on 2012-02-14
US20110206865A1
Chemistry; metallurgy

Method of and apparatus utilizing carbon cord for evaporation of metals

#61 | 2011-08-11
US20110192993A1
Electricity

ADJUSTABLE SHADOW MASK ASSEMBLY FOR USE IN SOLAR CELL FABRICATIONS

#62 | 2011-06-30 ✅ Patent 8,303,764 granted on 2012-11-06
US20110158773A1
Electricity

Apparatus and methods for transporting and processing substrates

#63 | 2011-05-05 ✅ Patent 8,087,380 granted on 2012-01-03
US20110104847A1
Electricity

Evaporative system for solar cell fabrication

#64 | 2011-03-03 ✅ Patent 8,421,012 granted on 2013-04-16
US20110049365A1
Electricity

Low energy portable low-light camera with wavelength cutoff

#65 | 2010-12-30
US20100326602A1
Electricity

ELECTROSTATIC CHUCK

#66 | 2010-12-23 ✅ Patent 8,749,053 granted on 2014-06-10
US20100323508A1
Electricity

Plasma grid implant system for use in solar cell fabrications

#67 | 2010-09-23 ✅ Patent 8,715,515 granted on 2014-05-06
US20100237042A1
Physics

Process for optimization of island to trench ratio in patterned media

#68 | 2010-08-19 ✅ Patent 8,363,378 granted on 2013-01-29
US20100208409A1
Electricity

Method for optimized removal of wafer from electrostatic chuck

#69 | 2010-04-22 ✅ Patent 8,697,189 granted on 2014-04-15
US20100098862A1
Electricity

Method and apparatus for precision surface modification in nano-imprint lithography

#70 | 2010-02-04 ✅ Patent 9,157,145 granted on 2015-10-13
US20100024731A1
Chemistry; metallurgy

Processing tool with combined sputter and evaporation deposition sources

#71 | 2010-01-07 ✅ Patent 8,795,466 granted on 2014-08-05
US20100003768A1
Electricity

System and method for processing substrates with detachable mask

#72 | 2009-12-31 ✅ Patent 8,992,153 granted on 2015-03-31
US20090324369A1
Electricity

System and method for substrate transport

#73 | 2009-12-17 ✅ Patent 8,871,619 granted on 2014-10-28
US20090309039A1
Electricity

Application specific implant system and method for use in solar cell fabrications

#74 | 2009-12-17 ✅ Patent 8,697,553 granted on 2014-04-15
US20090308450A1
Electricity

Solar cell fabrication with faceting and ion implantation

#75 | 2009-11-12 ✅ Patent 8,382,965 granted on 2013-02-26
US20090279990A1
Electricity

Tools and methods for mounting transport rails in a substrate processing system

#76 | 2009-10-08 ✅ Patent 8,206,551 granted on 2012-06-26
US20090252582A1
Electricity

Processing thin wafers

#77 | 2009-07-30 ✅ Patent 9,524,896 granted on 2016-12-20
US20090191030A1
Electricity

Apparatus and methods for transporting and processing substrates

#78 | 2009-06-11 ✅ Patent 8,784,622 granted on 2014-07-22
US20090145881A1
Physics

System and method for dual-sided sputter etch of substrates

#79 | 2009-06-11 ✅ Patent 8,349,196 granted on 2013-01-08
US20090145879A1
Physics

System and method for commercial fabrication of patterned media

#80 | 2009-06-11 ✅ Patent 9,165,587 granted on 2015-10-20
US20090145752A1
Physics

System and method for dual-sided sputter etch of substrates

#81 | 2009-05-28 ✅ Patent 8,125,637 granted on 2012-02-28
US20090135417A1
Physics

Optical beam spectrometer with movable lens

#82 | 2009-05-14 ✅ Patent 8,834,088 granted on 2014-09-16
US20090123256A1
Electricity

Elevator linear motor drive

#83 | 2009-04-02
US20090086401A1
Electricity

ELECTROSTATIC CHUCK APPARATUS

#84 | 2009-04-02
US20090086400A1
Electricity

ELECTROSTATIC CHUCK APPARATUS

#85 | 2009-03-26 ✅ Patent 8,293,066 granted on 2012-10-23
US20090078374A1
Electricity

Apparatus and methods for transporting and processing substrates

#86 | 2009-01-01
US20090004873A1
Electricity

HYBRID ETCH CHAMBER WITH DECOUPLED PLASMA CONTROLS

#87 | 2008-08-14
US20080191155A1
Mechanical engineering

MAGNETICALLY COUPLED VALVE ACTUATOR

#88 | 2008-03-20 ✅ Patent 7,901,539 granted on 2011-03-08
US20080066678A1
Electricity

Apparatus and methods for transporting and processing substrates

#89 | 2007-02-15 ✅ Patent 7,531,826 granted on 2009-05-12
US20070034987A1
Electricity

Photocathode structure and operation

#90 | 2006-06-29 ✅ Patent 7,479,686 granted on 2009-01-20
US20060138322A1
Electricity

Backside imaging through a doped layer

#91 | 2006-06-01 ✅ Patent 7,608,533 granted on 2009-10-27
US20060113655A1
Electricity

Semiconductor die attachment for high vacuum tubes

#92 | 2006-05-18 ✅ Patent 7,611,322 granted on 2009-11-03
US20060102285A1
Electricity

Processing thin wafers

#93 | 2006-05-09 ✅ Patent 7,042,060 granted on 2006-05-09
US10891877
-

Backside thinning of image array devices

#94 | 2006-02-28 ✅ Patent 7,005,637 granted on 2006-02-28
US10795041
-

Backside thinning of image array devices

#95 | 2005-11-29 ✅ Patent 6,969,839 granted on 2005-11-29
US10355836
-

Backthinned CMOS sensor with low fixed pattern noise

#96 | 2005-11-24 ✅ Patent 7,607,560 granted on 2009-10-27
US20050258212A1
Performing operations; transporting

Semiconductor die attachment for high vacuum tubes

#97 | 2005-11-17 ✅ Patent 7,012,328 granted on 2006-03-14
US20050253242A1
Electricity

Semiconductor die attachment for high vacuum tubes

#98 | 2005-11-17 ✅ Patent 7,000,418 granted on 2006-02-21
US20050252227A1
Physics

Capacitance sensing for substrate cooling

#99 | 2005-07-28 ✅ Patent 6,943,425 granted on 2005-09-13
US20050161703A1
Electricity

Wavelength extension for backthinned silicon image arrays

#100 | 2005-07-19 ✅ Patent 6,919,001 granted on 2005-07-19
US10361308
-

Disk coating system

Also check out Intevac, Inc.'s (Santa Clara, United States) applicant profile with 49 patent applications submitted.

AssigneeID:

17272 ⎘