ASML Mask Tools B.V.

City:

Veldhoven

Country:

Netherlands

Published Applications:

Last publication date:

2012-05-03

Patent Grants:

Last grant date:

2019-08-20

Top Inventors for applications by ASML Mask Tools B.V.

These are the the leading inventors for applications assigned to ASML Mask Tools B.V.:

Duan-Fu Stephen Hsu 1 Fremont, CA United States
Jang Fung Chen 1 Cupertino, CA United States
Steve Hansen 1 Phoenix, AZ United States
Sangbong Park 1 Union City, CA United States

Douglas Van Den Broeke 1 Sunnyvale, CA United States

Recent patent applications by ASML Mask Tools B.V.

ASML Mask Tools B.V. based in Veldhoven, NL has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:

#1 | 2012-05-03 ✅ Patent 10,386,730 granted on 2019-08-20

US20120109607A1

Physics

Method, program product and apparatus for predicting line width roughness and resist pattern failure and the use thereof in a lithography simulation process

#2 | 2011-01-20 ✅ Patent 7,981,576 granted on 2011-07-19

US20110014552A1

Physics

Method and apparatus for performing dark field double dipole lithography (DDL)

AssigneeID:

181743 ⎘