Phoenix, Arizona
United States
5
2012-05-03
The entities that hold a legal rights for patent applications filed by inventor Hansen Steve:
Steve Hansen from Phoenix, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Method, program product and apparatus for predicting line width roughness and resist pattern failure and the use thereof in a lithography simulation process
#2 | 2011-03-03Optimized polarization illumination
#3 | 2008-07-31Method, program product and apparatus for predicting line width roughness and resist pattern failure and the use thereof in a lithography simulation process
#4 | 2008-02-21Optimized polarization illumination
#5 | 2005-06-23Optimized polarization illumination
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