Wilmington, Massachusetts
United States
124
2011-06-09
107
2013-05-28
These are the the leading inventors for applications assigned to MKS Instruments, Inc.:
MKS Instruments, Inc. based in Wilmington, US has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Devices, systems, and methods for carbonation of deionized water
#2 | 2010-08-05 ✅ Patent 8,040,068 granted on 2011-10-18Radio frequency power control system
#3 | 2010-07-01 ✅ Patent 7,871,587 granted on 2011-01-18Reactive chemical containment system
#4 | 2010-03-25 ✅ Patent 7,863,996 granted on 2011-01-04Tune range limiter
#5 | 2010-01-07 ✅ Patent 7,872,523 granted on 2011-01-18Radio frequency (RF) envelope pulsing using phase switching of switch-mode power amplifiers
#6 | 2009-09-10 ✅ Patent 7,962,294 granted on 2011-06-14Integrated absolute and differential pressure transducer
#7 | 2009-08-20 ✅ Patent 8,289,029 granted on 2012-10-16Application of wideband sampling for arc detection with a probabilistic model for quantitatively measuring arc events
#8 | 2009-08-20 ✅ Patent 8,264,237 granted on 2012-09-11Application of wideband sampling for arc detection with a probabilistic model for quantitatively measuring arc events
#9 | 2009-07-23 ✅ Patent 7,704,392 granted on 2010-04-27Minimal residual liquid retention filter housing
#10 | 2009-05-28MULTI-ZONE PRESSURE CONTROL SYSTEM
#11 | 2009-02-26MULTIVARIATE MULTIPLE MATRIX ANALYSIS OF ANALYTICAL AND SENSORY DATA
#12 | 2008-12-25 ✅ Patent 7,889,477 granted on 2011-02-15High voltage power supply for static neutralizers
#13 | 2008-12-09 ✅ Patent 7,461,549 granted on 2008-12-09Mass flow verifiers capable of providing different volumes, and related methods
#14 | 2008-10-23 ✅ Patent 7,731,161 granted on 2010-06-08Devices, systems, and methods for carbonation of deionized water
#15 | 2008-09-18 ✅ Patent 8,055,203 granted on 2011-11-08Multipoint voltage and current probe system
#16 | 2008-09-11 ✅ Patent 7,630,786 granted on 2009-12-08Manufacturing process end point detection
#17 | 2008-09-11Pressure control for vacuum processing system
#18 | 2008-08-21 ✅ Patent 7,728,602 granted on 2010-06-01Harmonic derived arc detector
#19 | 2008-07-31 ✅ Patent 7,777,567 granted on 2010-08-17RF power amplifier stability network
#20 | 2008-07-31RADIO FREQUENCY POWER DELIVERY SYSTEM
#21 | 2008-07-10 ✅ Patent 7,706,925 granted on 2010-04-27Integrated pressure and flow ratio control system
#22 | 2008-06-19 ✅ Patent 7,969,096 granted on 2011-06-28Inductively-coupled plasma source
#23 | 2008-04-17 ✅ Patent 7,809,473 granted on 2010-10-05Apparatus and method for pressure fluctuation insensitive mass flow control
#24 | 2008-04-10Oxygen conditioning of plasma vessels
#25 | 2008-04-10OXYGEN CONDITIONING OF PLASMA VESSELS
#26 | 2008-01-10Classifying faults associated with a manufacturing process
#27 | 2008-01-03 ✅ Patent 7,622,037 granted on 2009-11-24Ozonated water flow and concentration control apparatus and method
#28 | 2007-12-13 ✅ Patent 7,477,996 granted on 2009-01-13Integrated absolute and differential pressure transducer
#29 | 2007-12-13Power Over Ethernet (Poe) - Based Measurement System
#30 | 2007-12-13 ✅ Patent 7,336,511 granted on 2008-02-26Power supply control loop with multiple leveling modes
#31 | 2007-12-06CONTROL SYSTEM FOR STATIC NEUTRALIZER
#32 | 2007-11-29Methods and apparatus for downstream dissociation of gases
#33 | 2007-10-18 ✅ Patent 8,997,791 granted on 2015-04-07Multiple-channel flow ratio controller
#34 | 2007-10-11 ✅ Patent 7,643,909 granted on 2010-01-05Highly responsive master-slave valve positioning
#35 | 2007-09-06 ✅ Patent 7,397,676 granted on 2008-07-08Class E amplifier with inductive clamp
#36 | 2007-08-09Linked extendable gas observation system for infrared absorption spectroscopy
#37 | 2007-07-26 ✅ Patent 7,467,027 granted on 2008-12-16Compensation for thermal siphoning in mass flow controllers
#38 | 2007-07-12 ✅ Patent 7,697,258 granted on 2010-04-13Air assist for AC ionizers
#39 | 2007-07-03 ✅ Patent 7,238,266 granted on 2007-07-03Method and apparatus for fluorine generation and recirculation
#40 | 2007-06-28Graphical User Interface
#41 | 2007-06-28 ✅ Patent 7,659,489 granted on 2010-02-09Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel
#42 | 2007-06-28 ✅ Patent 7,541,558 granted on 2009-06-02Inductively-coupled toroidal plasma source
#43 | 2007-06-21 ✅ Patent 7,764,140 granted on 2010-07-27Radio frequency power delivery system
#44 | 2007-06-07 ✅ Patent 7,313,454 granted on 2007-12-25Method and apparatus for classifying manufacturing outputs
#45 | 2007-05-31 ✅ Patent 7,696,639 granted on 2010-04-13Three phase rectifier circuit with virtual neutral
#46 | 2007-05-24 ✅ Patent 7,296,465 granted on 2007-11-20Vertical mount mass flow sensor
#47 | 2007-05-10AC Ionizer with Enhanced Ion Balance
#48 | 2007-05-10 ✅ Patent 7,353,771 granted on 2008-04-08Method and apparatus of providing power to ignite and sustain a plasma in a reactive gas generator
#49 | 2007-04-24 ✅ Patent 7,209,518 granted on 2007-04-24Higher PWM resolution for switchmode power supply control
#50 | 2007-04-12 ✅ Patent 7,548,741 granted on 2009-06-16Dual logarithmic amplifier phase-magnitude detector
#51 | 2007-04-12 ✅ Patent 8,053,700 granted on 2011-11-08Applicators and cooling systems for a plasma device
#52 | 2007-02-22 ✅ Patent 7,829,353 granted on 2010-11-09Pulsed mass flow delivery system and method
#53 | 2007-02-22 ✅ Patent 7,615,120 granted on 2009-11-10Pulsed mass flow delivery system and method
#54 | 2007-02-15Method and system for producing ozonized deionized water
#55 | 2007-02-01 ✅ Patent 7,316,163 granted on 2008-01-08Method of forming a seal between a housing and a diaphragm of a capacitance sensor
#56 | 2007-02-01 ✅ Patent 9,214,909 granted on 2015-12-15High reliability RF generator architecture
#57 | 2007-02-01 ✅ Patent 7,624,643 granted on 2009-12-01Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor
#58 | 2007-02-01 ✅ Patent 7,735,452 granted on 2010-06-15Sensor for pulsed deposition monitoring and control
#59 | 2007-01-25 ✅ Patent 7,809,450 granted on 2010-10-05Self-correcting multivariate analysis for use in monitoring dynamic parameters in process environments
#60 | 2007-01-25 ✅ Patent 7,892,502 granted on 2011-02-22Ozone system for multi-chamber tools
#61 | 2007-01-23 ✅ Patent 7,166,816 granted on 2007-01-23Inductively-coupled torodial plasma source
#62 | 2007-01-09 ✅ Patent 7,161,112 granted on 2007-01-09Toroidal low-field reactive gas source
#63 | 2006-12-26 ✅ Patent 7,155,363 granted on 2006-12-26Thermal imaging for semiconductor process monitoring
#64 | 2006-12-21 ✅ Patent 7,474,968 granted on 2009-01-06Critical flow based mass flow verifier
#65 | 2006-11-23 ✅ Patent 7,477,711 granted on 2009-01-13Synchronous undersampling for high-frequency voltage and current measurements
#66 | 2006-11-16 ✅ Patent 7,620,516 granted on 2009-11-17Versatile semiconductor manufacturing controller with statistically repeatable response times
#67 | 2006-11-14 ✅ Patent 7,136,767 granted on 2006-11-14Apparatus and method for calibration of mass flow controller
#68 | 2006-11-09 ✅ Patent 7,890,220 granted on 2011-02-15Low overhead closed loop control system
#69 | 2006-11-07 ✅ Patent 7,133,921 granted on 2006-11-07Portable devices for different control interfaces
#70 | 2006-10-26 ✅ Patent 7,546,208 granted on 2009-06-09Method and apparatus of signal processing for use in spectrometry using an improved apodization function
#71 | 2006-10-26Fourier transform infrared spectrometer
#72 | 2006-10-24 ✅ Patent 7,124,640 granted on 2006-10-24Thermal mounting plate for heated pressure transducer
#73 | 2006-09-28 ✅ Patent 7,174,263 granted on 2007-02-06External volume insensitive flow verification
#74 | 2006-09-28 ✅ Patent 7,463,991 granted on 2008-12-09Mass flow verifier with flow restrictor
#75 | 2006-09-28 ✅ Patent 7,248,113 granted on 2007-07-24Methods and systems for stabilizing an amplifier
#76 | 2006-08-24 ✅ Patent 7,278,444 granted on 2007-10-09Valve assembly having improved pump-down performance
#77 | 2006-08-17 ✅ Patent 7,455,720 granted on 2008-11-25Method and apparatus for preventing products of TiCLand NHor other feed gas reactions from damaging vacuum pumps in TiN or other deposition systems
#78 | 2006-08-03 ✅ Patent 7,424,346 granted on 2008-09-09Apparatus and method for pressure fluctuation insensitive mass flow control
#79 | 2006-07-20 ✅ Patent 7,180,758 granted on 2007-02-20Class E amplifier with inductive clamp
#80 | 2006-07-20 ✅ Patent 7,204,150 granted on 2007-04-17Turbo sump for use with capacitive pressure sensor
#81 | 2006-07-18 ✅ Patent 7,076,920 granted on 2006-07-18Method of using a combination differential and absolute pressure transducer for controlling a load lock
#82 | 2006-06-29 ✅ Patent 7,387,135 granted on 2008-06-17Valve assembly having rigid seating surfaces
#83 | 2006-06-29Methods and apparatus for downstream dissociation of gases
#84 | 2006-06-22 ✅ Patent 7,628,861 granted on 2009-12-08Pulsed mass flow delivery system and method
#85 | 2006-05-25 ✅ Patent 7,151,976 granted on 2006-12-19Multivariate control of semiconductor processes
#86 | 2006-05-25 ✅ Patent 7,264,006 granted on 2007-09-04Ozonated water flow and concentration control apparatus and method
#87 | 2006-05-18 ✅ Patent 7,107,834 granted on 2006-09-19Thermal mass flow rate sensor including bypass passageways and a sensor passageway having similar entrance effects
#88 | 2006-05-18 ✅ Patent 7,121,139 granted on 2006-10-17Thermal mass flow rate sensor having fixed bypass ratio
#89 | 2006-04-27 ✅ Patent 7,569,790 granted on 2009-08-04Method and apparatus for processing metal bearing gases
#90 | 2006-04-20 ✅ Patent 7,157,807 granted on 2007-01-02Three phase rectifier circuit with virtual neutral
#91 | 2006-04-13 ✅ Patent 7,141,447 granted on 2006-11-28Method of forming a seal between a housing and a diaphragm of a capacitance sensor
#92 | 2006-03-23Precursor gas delivery with carrier gas mixing
#93 | 2006-03-07 ✅ Patent 7,007,707 granted on 2006-03-07Mass flow ratio system and method
#94 | 2006-02-28 ✅ Patent 7,004,191 granted on 2006-02-28Apparatus and method for mass flow controller with embedded web server
#95 | 2006-02-21 ✅ Patent 7,000,479 granted on 2006-02-21Heated pressure transducer
#96 | 2006-02-21 ✅ Patent 7,000,463 granted on 2006-02-21Reynolds number correction function for mass flow rate sensor
#97 | 2006-02-21 ✅ Patent 7,000,465 granted on 2006-02-21Attitude error self-correction for thermal sensors of mass flow meters and controllers
#98 | 2006-01-19 ✅ Patent 8,089,026 granted on 2012-01-03Methods for control of plasma transitions in sputter processing systems using a resonant circuit
#99 | 2005-10-18 ✅ Patent 6,955,072 granted on 2005-10-18System and method for in-situ flow verification and calibration
#100 | 2005-10-13 ✅ Patent 7,628,860 granted on 2009-12-08Pulsed mass flow delivery system and method
202233 ⎘