Lexington, Massachusetts
United States
16
2017-12-28
The entities that hold a legal rights for patent applications filed by inventor Goodman Daniel:
Daniel Goodman from Lexington, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Workpiece loader for a wet processing system
#2 | 2013-02-28Edge bevel removal apparatus and method
#3 | 2013-01-10Substrate loader and unloader having a Bernoulli support
#4 | 2013-01-10Substrate loader and unloader
#5 | 2013-01-10Substrate loader and unloader having an air bearing support
#6 | 2012-12-27Substrate holder
#7 | 2012-06-21SEED LAYER DEPOSITION IN MICROSCALE FEATURES
#8 | 2011-10-06Seed layer deposition in microscale features
#9 | 2011-05-19Apparatus for thermal processing with micro-environment
#10 | 2011-02-03SUBSTRATE PROCESSING PALLET WITH COOLING
#11 | 2010-09-16Radio frequency power delivery system
#12 | 2008-09-11Substrate processing pallet with cooling
#13 | 2007-06-21Radio frequency power delivery system
#14 | 2005-05-19Stabilization of electronegative plasmas with feedback control of RF generator systems
#15 | 2005-05-03RF power supply with integrated matching network
#16 | 2005-03-17Methods and apparatus for calibration and metrology for an integrated RF generator system
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