Goettingen
Germany
6
2010-11-11
5
2012-04-10
These are the the leading inventors for applications assigned to XTREME TECHNOLOGIES GMBH:
XTREME TECHNOLOGIES GMBH based in Goettingen, DE has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Arrangement for the continuous generation of liquid tin as emitter material in EUV radiation sources
#2 | 2010-04-01METHOD AND ARRANGEMENT FOR THE OPERATION OF PLASMA-BASED SHORT-WAVELENGTH RADIATION SOURCES
#3 | 2008-07-31 ✅ Patent 7,812,542 granted on 2010-10-12Arrangement and method for the generation of extreme ultraviolet radiation by means of an electrically operated gas discharge
#4 | 2008-05-22 ✅ Patent 7,619,232 granted on 2009-11-17Method and device for producing extreme ultraviolet radiation or soft X-ray radiation
#5 | 2007-04-12 ✅ Patent 7,755,070 granted on 2010-07-13Arrangement for the suppression of unwanted spectral components in a plasma-based EUV radiation source
#6 | 2007-02-22 ✅ Patent 7,800,086 granted on 2010-09-21Arrangement for radiation generation by means of a gas discharge
226553 ⎘