Uwe Stamm

City:

Goettingen

Country:

Germany

Published Applications:

Last publication date:

2008-05-22

Top Assignees for applications by Uwe Stamm

The entities that hold a legal rights for patent applications filed by inventor Stamm Uwe:

Uwe Stamm from Goettingen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

Method and device for producing extreme ultraviolet radiation or soft X-ray radiation

Absolute wavelength calibration of lithography laser using multiple element or tandem see through hollow cathode lamp

Arrangement for monitoring the energy radiated by an EUV radiation source

Radiation source for generating extreme ultraviolet radiation

Electrical excitation circuit for a pulsed gas laser

InventorID:

4177164 ⎘