Axcelis Technologies,Inc.

City:

Beverly, Massachusetts

Country:

United States

Published Applications:

Last publication date:

2010-04-08

Patent Grants:

Last grant date:

2016-09-13

Top Inventors for applications by Axcelis Technologies,Inc.

These are the the leading inventors for applications assigned to Axcelis Technologies,Inc.:

Bo H. Vanderberg 1 Gloucester, MA United States
Andrew M. Ray 1 Newburyport, MA United States

Recent patent applications by Axcelis Technologies,Inc.

Axcelis Technologies,Inc. based in Beverly, US has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:

#1 | 2010-04-08 ✅ Patent 9,443,698 granted on 2016-09-13

US20100084576A1

Electricity

Hybrid scanning for ion implantation

#2 | 2009-12-03 ✅ Patent 7,994,487 granted on 2011-08-09

US20090294698A1

Electricity

Control of particles on semiconductor wafers when implanting boron hydrides

AssigneeID:

233978 ⎘