Bo H. Vanderberg

Ion implantation system having beam angle control in drift and deceleration modes

System and method to improve productivity of hybrid scan ion beam implanters

Beam profiling speed enhancement for scanned beam implanters

SYSTEMS AND METHODS FOR BEAM ANGLE ADJUSTMENT IN ION IMPLANTERS WITH BEAM DECELARATION

Combined electrostatic lens system for ion implantation

Beam line design to reduce energy contamination

System and method for ion implantation with improved productivity and uniformity

System and method for ion implantation with improved productivity and uniformity

Uniformity of a scanned ion beam

System and method for ion implantation with improved productivity and uniformity

Enhanced low energy ion beam transport in ion implantation

Hybrid scanning for ion implantation

ADJUSTABLE DEFLECTION OPTICS FOR ION IMPLANTATION

Method and apparatus for measurement of beam angle in ion implantation

Ion implanter having combined hybrid and double mechanical scan architecture

Plasma electron flood for ion beam implanter

Ion implanter having combined hybrid and double mechanical scan architecture

Method and system for ion beam profiling

System and method for two-dimensional beam scan across a workpiece of an ion implanter

Beam line architecture for ion implanter

Ion beam scanning control methods and systems for ion implantation uniformity

Beam angle adjustment in ion implanters

System for magnetic scanning and correction of an ion beam

Ion source

Systems and methods for beam angle adjustment in ion implanters

Throughput enhancement for scanned beam ion implanters

Systems and methods for beam angle adjustment in ion implanters

Beam current stabilization utilizing gas feed control loop

Means to establish orientation of ion beam to wafer and correct angle errors

Method and apparatus for ion beam profiling

Biased electrostatic deflector

Scanning systems and methods for providing ions from an ion beam to a workpiece

Magnet for scanning ion beams

Ion beam scanning systems and methods for improved ion implantation uniformity

Thin magnetron structures for plasma generation in ion implantation systems

Method and system for ion beam containment using photoelectrons in an ion beam guide