Osaka
Japan
4
2009-02-05
4
2011-01-04
These are the the leading inventors for applications assigned to Teitokusha Co., Ltd.:
Teitokusha Co., Ltd. based in Osaka, JP has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Substrate processing apparatus, heating apparatus for use in the same, method of manufacturing semiconductors with those apparatuses, and heating element supporting structure
#2 | 2009-01-15 ✅ Patent 8,116,618 granted on 2012-02-14Heating apparatus, substrate processing apparatus, and method of manufacturing semiconductor devices
#3 | 2009-01-15 ✅ Patent 9,184,069 granted on 2015-11-10Heating apparatus, substrate processing apparatus employing the same, method of manufacturing semiconductor devices, and insulator
#4 | 2009-01-15 ✅ Patent 8,158,911 granted on 2012-04-17Heating apparatus, substrate processing apparatus employing the same, method of manufacturing semiconductor devices, and extending member
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